发明授权
- 专利标题: Avalanche photodiode for use in harsh environments
- 专利标题(中): 用于恶劣环境的雪崩光电二极管
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申请号: US10314986申请日: 2002-12-10
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公开(公告)号: US06838741B2公开(公告)日: 2005-01-04
- 发明人: Peter M. Sandvik , Dale M. Brown , Stephen D. Arthur , Kevin S. Matocha , James W. Kretchmer
- 申请人: Peter M. Sandvik , Dale M. Brown , Stephen D. Arthur , Kevin S. Matocha , James W. Kretchmer
- 申请人地址: US NY Niskayuna
- 专利权人: General Electtric Company
- 当前专利权人: General Electtric Company
- 当前专利权人地址: US NY Niskayuna
- 主分类号: G01J1/02
- IPC分类号: G01J1/02 ; H01J20060101 ; H01L31/0232 ; H01L31/0248 ; H01L31/0304 ; H01L31/0312 ; H01L31/0352 ; H01L31/06 ; H01L31/062 ; H01L31/107 ; H01L31/113 ; H01L31/115
摘要:
An aspect of the present invention is directed to an avalanche photodiode (APD) device for use in oil well drilling applications in harsh, down-hole environments where shock levels are near 250 gravitational acceleration (G) and/or temperatures approach or exceed 150° C. Another aspect of the present invention is directed to an APD device fabricated using SiC materials. Another aspect of the present invention is directed to an APD device fabricated using GaN materials. According to an embodiment of the present invention, an avalanche photodiode for detecting ultraviolet photons comprises a substrate having a first dopant; a first layer having the first dopant, positioned on top of the substrate; a second layer having a second dopant, positioned on top of the first layer; a third layer having a second dopant, positioned on top of the second layer; a passivation layer for providing electrical passivation on a surface of the avalanche photodiode; a phosphorous silicate glass layer for limiting mobile ion transport, positioned on top of the third layer; and a pair of metal electrodes for providing an ohmic contact wherein a first electrode is positioned below the substrate and a second electrode is positioned above the third layer; wherein the avalanche photodiode comprises a first sidewall and a second sidewall forming a sloped mesa shape; and wherein the avalanche photodiode operates in an environment comprising a temperature approximately equal to 150 degrees Celsius.
公开/授权文献
- US20040108530A1 Avalanche photodiode for use in harsh environments 公开/授权日:2004-06-10
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