Invention Grant
US06876039B2 Variable threshold voltage complementary MOSFET with SOI structure
有权
具有SOI结构的可变阈值电压互补MOSFET
- Patent Title: Variable threshold voltage complementary MOSFET with SOI structure
- Patent Title (中): 具有SOI结构的可变阈值电压互补MOSFET
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Application No.: US10739200Application Date: 2003-12-19
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Publication No.: US06876039B2Publication Date: 2005-04-05
- Inventor: Masao Okihara
- Applicant: Masao Okihara
- Applicant Address: JP Tokyo
- Assignee: Oki Electric Industry Co., Ltd.
- Current Assignee: Oki Electric Industry Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Volentine Francos & Whitt, PLLC
- Priority: JP2003-185337 20030627
- Main IPC: H01L27/04
- IPC: H01L27/04 ; H01L21/822 ; H01L21/8238 ; H01L27/08 ; H01L27/092 ; H01L27/12 ; H01L29/786 ; H01L31/119

Abstract:
The dependency of threshold voltage on adjusted bias voltage is varied between N-channel and P-channel MOSFETs. A support substrate, an insulating layer on the support substrate, and island-shaped first and second silicon layers separately formed on the insulating layer; a first MOSFET formed of a fully depleted SOI where a first channel part is formed in a first silicon layer; and a second MOSFET formed of a partially depleted SOI where a second channel part is formed in a second silicon layer, the second MOSFET configures a complementary MOSFET with the first MOSFET, are provided. The threshold voltage of the second MOSFET formed of the partially depleted SOI is hardly varied because of a neutral region in the second channel part, although bias voltage is applied to the support substrate to vary the threshold voltage of the first MOSFET formed of the fully depleted SOI.
Public/Granted literature
- US20040262647A1 Variable threshold voltage complementary MOSFET with SOI structure Public/Granted day:2004-12-30
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