发明授权
US06917077B2 Protection diode for improved ruggedness of a radio frequency power transistor and self-defining method to manufacture such protection diode 有权
用于改善射频功率晶体管的耐用性的保护二极管和用于制造这种保护二极管的自定义方法

Protection diode for improved ruggedness of a radio frequency power transistor and self-defining method to manufacture such protection diode
摘要:
A semiconductor arrangement including: a substrate having a substrate layer (13) with an upper and lower surface, the substrate layer (13) being of a first conductivity type; a first buried layer (12) in the substrate, extending along said lower surface below a first portion of said upper surface of said substrate layer (13), and a second buried layer (12) in the substrate, extending along said lower surface below a second portion of said upper surface of said substrate layer (13); a first diffusion (26) in said first portion of said substrate layer (13), being of a second conductivity type opposite to said first conductivity type and having a first distance to said first buried layer (12) for defining a first breakdown voltage between said first diffusion (26) and said first buried layer (12); a second diffusion (45) in said second portion of said substrate layer (13), being of said second conductivity type and having a second distance to said second buried layer (12) for defining a second breakdown voltage between said second diffusion (45) and said second buried layer (12); said first distance being larger than said second distance such that said first breakdown voltage is larger than said second breakdown voltage.
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