发明授权
- 专利标题： Precursor compositions for the deposition of electrically conductive features
- 专利标题（中）： 用于沉积导电特征的前体组合物
-
申请号： US10265296申请日： 2002-10-04
-
公开(公告)号： US06951666B2公开(公告)日： 2005-10-04
- 发明人: Toivo T. Kodas , Mark J. Hampden-Smith , Karel Vanheusden , Hugh Denham , Aaron D. Stump , Allen B. Schult , Paolina Atanassova , Klaus Kunze
- 申请人： Toivo T. Kodas , Mark J. Hampden-Smith , Karel Vanheusden , Hugh Denham , Aaron D. Stump , Allen B. Schult , Paolina Atanassova , Klaus Kunze
- 申请人地址： US MA Boston
- 专利权人： Cabot Corporation
- 当前专利权人： Cabot Corporation
- 当前专利权人地址： US MA Boston
- 代理机构： Marsh Fischmann & Breyfogle LLP
- 主分类号： C09D11/00
- IPC分类号： C09D11/00 ; H01B1/02 ; H01C17/065 ; H01L21/288 ; H01L21/314 ; H01L21/316 ; H05K1/09 ; H05K3/10 ; B05D3/02
摘要：
A precursor composition for the deposition and formation of an electrical feature such as a conductive feature. The precursor composition advantageously has a viscosity of at least about 1000 centipoise and can be deposited by screen printing. The precursor composition also has a low conversion temperature, enabling the deposition and conversion to an electrical feature on low temperature substrates. A particularly preferred precursor composition includes silver and/or copper metal for the formation of highly conductive features.
公开/授权文献
信息查询
IPC分类:
