发明授权
US06963595B2 Automatic gas control system for a gas discharge laser 失效
气体放电激光器自动气体控制系统

Automatic gas control system for a gas discharge laser
摘要:
An automatic F2 laser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the F2 consumption rates through the operating life of the laser system. These consumption rates are used by a processor programmed with an algorithm to determine F2 injections needed to maintain laser beam quality within a delivery range. Preferred embodiments include F2 controls for a two-chamber MOPA laser system.
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