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14 条记录 (耗时 0.023 秒)

    Base stabilization system
    4.
    发明授权
    Base stabilization system 有权
    基地稳定系统

    公开(公告)号：US06563128B2

    公开(公告)日：2003-05-13

    申请号：US10074059

    申请日：2002-02-11

    申请人： Leonard Lublin ,  David J. Warkentin ,  Baruch Pletner ,  John A. Rule

    发明人： Leonard Lublin ,  David J. Warkentin ,  Baruch Pletner ,  John A. Rule

    IPC分类号： G01N2186

    CPC分类号： F16F15/02 ,  F16F15/005 ,  F16F15/0275 ,  F16F2230/08 ,  G03F7/70725 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/709

    摘要： A system that provides a base stabilization system for controlling motion of a controlled structure. The system includes a ground structure such as the floor of a fabrication facility and the controlled structure includes a base on which equipment is mounted. The system also includes at least three air mounts and a plurality of actuators all attached to the ground structure and to the base to isolate the base from the ground structure and to stabilize the base. The system includes a plurality of position and acceleration sensors each of which are co-located with a corresponding actuator. The system also includes a multi-input, multi output feedback control system comprising a computer processor programmed with a feedback control algorithm for controlling each of the actuators based on feedback signals from each of the sensors. The co-location of the sensors with the actuators avoids serious problems resulting from higher order vibration modes.

    摘要翻译： 提供用于控制受控结构的运动的基本稳定系统的系统。 该系统包括诸如制造设备的底板的接地结构，并且受控结构包括安装设备的基座。 该系统还包括至少三个空气支架和多个致动器，所述致动器全部附接到地面结构和底座以将基座与地面结构隔离并稳定基座。 该系统包括多个位置和加速度传感器，每个位置和加速度传感器与相应的致动器共同定位。 该系统还包括多输入多输出反馈控制系统，其包括用基于来自每个传感器的反馈信号控制每个致动器的反馈控制算法编程的计算机处理器。 传感器与执行器的共同位置避免了由较高阶振动模式引起的严重问题。

    Portable Fuel Cell System Having a Fuel Cell System Controller
    5.
    发明申请
    Portable Fuel Cell System Having a Fuel Cell System Controller 审中-公开
    具有燃料电池系统控制器的便携式燃料电池系统

    公开(公告)号：US20160149239A1

    公开(公告)日：2016-05-26

    申请号：US14755982

    申请日：2015-06-30

    申请人： John A. Rule ,  Jacob P. Lipcon ,  Armin B. Kusig ,  John P. Fallon

    发明人： John A. Rule ,  Jacob P. Lipcon ,  Armin B. Kusig ,  John P. Fallon

    IPC分类号： H01M8/04537 ,  H01M8/1246 ,  H01M8/04828 ,  H01M8/04223 ,  H01M8/0432 ,  H01M8/04089

    CPC分类号： H01M8/04223 ,  H01M8/04089 ,  H01M8/0432 ,  H01M8/04619 ,  H01M8/04925 ,  H01M16/006 ,  H01M2008/1293 ,  H01M2250/30 ,  Y02B90/18

    摘要： A portable fuel cell system includes a fuel cell having a plurality of flow inputs and a power output, a temperature sensor configured to measure operating temperature of the fuel cell, a power output sensor coupled to the fuel cell and configured to measure a power parameter related to fuel cell power output, a controllable power converter, coupled to the power output of the fuel cell, that transfers power from the fuel cell to the fuel cell system, and a flow control device coupled to a first flow input and configured to control a first one of the flow inputs into the fuel cell. The system further includes a fuel cell system controller, coupled to the fuel cell, the power output, the temperature sensor, the power output sensor, the controllable power converter, and the flow control device.

    摘要翻译： 便携式燃料电池系统包括具有多个流量输入和功率输出的燃料电池，配置成测量燃料电池的工作温度的温度传感器，耦合到燃料电池的功率输出传感器，并被配置为测量相关的功率参数 燃料电池功率输出，耦合到燃料电池的功率输出的可控功率转换器，其将来自燃料电池的功率传递到燃料电池系统;以及流量控制装置，其耦合到第一流量输入并被配置为控制 进入燃料电池的第一个流量输入。 该系统还包括燃料电池系统控制器，其耦合到燃料电池，功率输出，温度传感器，功率输出传感器，可控电力转换器和流量控制装置。

    Laser spectral engineering for lithographic process
    10.
    发明授权
    Laser spectral engineering for lithographic process 有权
    激光光谱工程用于光刻工艺

    公开(公告)号：US07382815B2

    公开(公告)日：2008-06-03

    申请号：US10915517

    申请日：2004-08-09

    申请人： Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

    发明人： Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

    IPC分类号： H01S5/00

    CPC分类号： G03F7/70575 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0812 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258

    摘要： An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.

    摘要翻译： 一种称为光电工程的集成电路光刻技术，用于放电激光器的带宽控制。 在优选的方法中，使用计算机模型来模拟光刻参数以确定产生所需光刻结果所需的所需激光光谱。 然后使用快速响应的调谐机构来调整脉冲串中的激光脉冲的中心波长，以实现接近所需激光光谱的脉冲串的集成光谱。 控制激光束带宽以产生具有至少两个光谱峰值的有效光束光谱，以便在光致抗蚀剂膜中产生改进的图案分辨率。 提供了具有至少一个压电驱动器和具有小于约2.0毫秒的时间响应的快速带宽检测控制系统的线窄设备。 在优选实施例中，波长调谐镜以与激光器的重复频率相位的每秒超过500次抖动的抖动速率抖动。 在一种情况下，用方波信号驱动压电驱动，在第二种情况下，它是用正弦波信号驱动的。 在另一个实施例中，最大位移与激光脉冲在一对一的基础上匹配，以便为一系列激光脉冲产生具有两个峰值的所需平均光谱。 其它优选实施例利用三个独立的波长调谐位置，产生具有三个独立峰值的光谱。