发明授权
US06969622B1 Anisotropically conductive connector, its manufacture method and probe member
有权
各向异性导电连接器，其制造方法和探头部件
- 专利标题： Anisotropically conductive connector, its manufacture method and probe member
- 专利标题（中）： 各向异性导电连接器，其制造方法和探头部件
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申请号： US10470746申请日： 2002-02-06
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公开(公告)号： US06969622B1公开(公告)日： 2005-11-29
- 发明人: Terukazu Kokubo , Koji Seno , Masaya Naoi , Kazuo Inoue
- 申请人： Terukazu Kokubo , Koji Seno , Masaya Naoi , Kazuo Inoue
- 申请人地址： JP Tokyo
- 专利权人： JSR Corporation
- 当前专利权人： JSR Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权： JP2001-033908 20010209
- 国际申请： PCT/JP02/00959 WO 20020206
- 国际公布： WO02/065588 WO 20020822
- 主分类号： H01R11/01
- IPC分类号： H01R11/01 ; G01R1/06 ; G01R1/073 ; G01R31/26 ; H01L21/66 ; H01R13/24 ; H01R43/00
摘要：
An anisotropically conductive connector, by which positioning, and holding and fixing to a wafer to be inspected can be conducted with ease even when the wafer has a large area, contains a frame plate having a plurality of anisotropically conductive film-arranging holes formed corresponding to regions of electrodes to be inspected of a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes and supported by the inner peripheral edge thereabout.
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