发明授权
- 专利标题： Gas sensor device
- 专利标题（中）： 气体传感器装置
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申请号： US10706767申请日： 2003-11-12
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公开(公告)号： US07053425B2公开(公告)日： 2006-05-30
- 发明人: Peter Micah Sandvik , Vinayak Tilak , Jesse Tucker , Stanton Earl Weaver , David Mulford Shaddock , Jonathan Lloyd Male , John Patrick Lemmon , Mark Allen Woodmansee , Venkatesan Manivannan , Deborah Ann Haitko
- 申请人： Peter Micah Sandvik , Vinayak Tilak , Jesse Tucker , Stanton Earl Weaver , David Mulford Shaddock , Jonathan Lloyd Male , John Patrick Lemmon , Mark Allen Woodmansee , Venkatesan Manivannan , Deborah Ann Haitko
- 申请人地址： US NY Niskayuna
- 专利权人： General Electric Company
- 当前专利权人： General Electric Company
- 当前专利权人地址： US NY Niskayuna
- 代理商 William E. Powell, III; Christian G. Cabou
- 主分类号： H01L31/312
- IPC分类号： H01L31/312 ; G01N27/12
摘要：
A gas sensor device including a semiconductor substrate; one or more catalytic gate-electrodes deposited on a surface of the semiconductor substrate; one or more ohmic contacts deposited on the surface of the semiconductor substrate and a passivation layer deposited on at least a portion of the surface; wherein the semiconductor substrate includes a material selected from the group consisting of silicon carbide, diamond, Group III nitrides, alloys of Group III nitrides, zinc oxide, and any combinations thereof.
公开/授权文献
- US20050097941A1 Gas sensor device 公开/授权日：2005-05-12
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