Invention Grant
US07087967B2 LSI device having core and interface regions with SOI layers of different thickness
有权
具有芯层的SOI器件和具有不同厚度的SOI层的界面区域
- Patent Title: LSI device having core and interface regions with SOI layers of different thickness
- Patent Title (中): 具有芯层的SOI器件和具有不同厚度的SOI层的界面区域
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Application No.: US10648784Application Date: 2003-08-27
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Publication No.: US07087967B2Publication Date: 2006-08-08
- Inventor: Toru Mori , Masao Okihara , Shinobu Takehiro
- Applicant: Toru Mori , Masao Okihara , Shinobu Takehiro
- Applicant Address: JP Tokyo
- Assignee: Oki Electric Industry Co., Ltd.
- Current Assignee: Oki Electric Industry Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: VolentineFrancos&Whitt,PLLC
- Priority: JP2002-256510 20020902
- Main IPC: H01L27/01
- IPC: H01L27/01

Abstract:
An LSI device includes a core region to which a first driving voltage is applied and an interface region to which a second driving voltage higher than the above first driving voltage is applied. The LSI device includes an SOI substrate and a device separation region for separating a SOI layer of the SOI substrate into the core region and the interface region. The thickness of the SOI layer of the core region is thinner than the thickness of the SOI layer of the interface region. The LSI device further includes first MOSFETs formed in the core region and in which the SOI layer of the core region is a fully depleted Si channel and second MOSFETs formed in the interface region and in which the SOI layer of the interface region is a fully depleted Si channel.
Public/Granted literature
- US20040070032A1 LSI device and manufacturing method of the above Public/Granted day:2004-04-15
Information query
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