发明授权
- 专利标题: Exposure apparatus
- 专利标题(中): 曝光装置
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申请号: US11249783申请日: 2005-10-13
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公开(公告)号: US07190432B2公开(公告)日: 2007-03-13
- 发明人: Sang Gi Kim , Ju Wook Lee , Jong Moon Park , Seong Wook Yoo , Kun Sik Park , Yong Sun Yoon , Yoon Kyu Bae , Byung Won Lim , Jin Gun Koo , Boo Woo Kim
- 申请人: Sang Gi Kim , Ju Wook Lee , Jong Moon Park , Seong Wook Yoo , Kun Sik Park , Yong Sun Yoon , Yoon Kyu Bae , Byung Won Lim , Jin Gun Koo , Boo Woo Kim
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Ladas & Parry LLP
- 优先权: KR10-2004-0096680 20041124
- 主分类号: G03B27/32
- IPC分类号: G03B27/32 ; G03B27/42 ; G03B27/70 ; G03B27/54
摘要:
Provided is a wafer exposure apparatus used in a semiconductor device manufacturing process, the exposure apparatus including: a reflective mirror for reflecting light provided from a light source; an optical path changer for changing a path of the light provided from the reflective mirror; first mirrors installed at both sides of the optical path changer to change the path of the light; second mirrors installed at both sides of a material to change the path of the light; and third mirrors installed at both sides of a mask to enter the light reflected by the first mirrors to the mask and to enter the light passed through the mask into the second mirrors, whereby it is possible to continuously expose one surface, both surfaces or a specific surface of a wafer in a state that the wafer is once aligned.
公开/授权文献
- US20060109444A1 Exposure apparatus 公开/授权日:2006-05-25
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