Invention Grant
- Patent Title: Charged beam dump and particle attractor
- Patent Title (中): 充电束流和吸引子
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Application No.: US11445677Application Date: 2006-06-02
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Publication No.: US07547899B2Publication Date: 2009-06-16
- Inventor: John W. Vanderpot , Yongzhang Huang
- Applicant: John W. Vanderpot , Yongzhang Huang
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: G21K5/10
- IPC: G21K5/10 ; H01J37/08

Abstract:
A system, method, and apparatus for mitigating contamination during ion implantation are provided. An ion source, end station, and mass analyzer positioned between the ion source and the end station are provided, wherein an ion beam is formed from the ion source and travels through the mass analyzer to the end station. An ion beam dump assembly comprising a particle collector, particle attractor, and shield are associated with the mass analyzer, wherein an electrical potential of the particle attractor is operable to attract and constrain contamination particles within the particle collector, and wherein the shield is operable to shield the electrical potential of the particle attractor from an electrical potential of an ion beam within the mass analyzer.
Public/Granted literature
- US20060284117A1 Charged beam dump and particle attractor Public/Granted day:2006-12-21
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