发明授权
- 专利标题: Packaging apparatus of terahertz device
- 专利标题(中): 太赫兹装置的包装装置
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申请号: US12176867申请日: 2008-07-21
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公开(公告)号: US07755100B2公开(公告)日: 2010-07-13
- 发明人: Sang Kuk Choi , Kwang Yong Kang , Mun Cheol Paek , Min Hwan Kwak
- 申请人: Sang Kuk Choi , Kwang Yong Kang , Mun Cheol Paek , Min Hwan Kwak
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, PC
- 优先权: KR10-2007-0128991 20071212
- 主分类号: H01L29/22
- IPC分类号: H01L29/22 ; H01L33/00 ; H01L29/227 ; H01L31/0203
摘要:
There is provided a packaging apparatus of a terahertz device, the apparatus including: a terahertz device having an active region at which terahertz wave is radiated or detected; a device substrate mounting the terahertz device whose active region is positioned at an opening region formed at the center of the device substrate, and electrically connecting the terahertz device and an external terminal to each other; a ball lens block arranged and fixed to an upper part of the terahertz device; and upper and lower cases receiving the device substrate mounted with the terahertz device therein and opening region vertical upper and lower portions of the active region of the terahertz device.
公开/授权文献
- US20090152699A1 PACKAGING APPARATUS OF TERAHERTZ DEVICE 公开/授权日:2009-06-18
信息查询
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