Packaging apparatus of terahertz device
    1.
    发明授权
    Packaging apparatus of terahertz device 失效
    太赫兹装置的包装装置

    公开(公告)号:US07755100B2

    公开(公告)日:2010-07-13

    申请号:US12176867

    申请日:2008-07-21

    CPC分类号: H01L31/0203 H01L31/02325

    摘要: There is provided a packaging apparatus of a terahertz device, the apparatus including: a terahertz device having an active region at which terahertz wave is radiated or detected; a device substrate mounting the terahertz device whose active region is positioned at an opening region formed at the center of the device substrate, and electrically connecting the terahertz device and an external terminal to each other; a ball lens block arranged and fixed to an upper part of the terahertz device; and upper and lower cases receiving the device substrate mounted with the terahertz device therein and opening region vertical upper and lower portions of the active region of the terahertz device.

    摘要翻译: 提供了一种太赫兹装置的包装装置,该装置包括:具有辐射或检测太赫兹波的有源区的太赫兹装置; 安装太赫兹器件的器件基板,其有源区域位于形成在器件基板的中心的开口区域,并将太赫兹器件和外部端子彼此电连接; 布置并固定到太赫兹装置的上部的球形透镜块; 以及容纳安装有太赫兹装置的装置基板的上壳体和下壳体以及太赫兹装置的有源区域的开口区域垂直上下部分。

    Terahertz wave TX/RX module package and method of manufacturing the same
    3.
    发明授权
    Terahertz wave TX/RX module package and method of manufacturing the same 有权
    太赫兹波TX / RX模块封装及其制造方法相同

    公开(公告)号:US08053732B2

    公开(公告)日:2011-11-08

    申请号:US12537445

    申请日:2009-08-07

    IPC分类号: G01J5/02

    摘要: Provided are a terahertz wave transmission and reception (Tx/Rx) module package and method of manufacturing the same. The complete and separate terahertz wave Tx/Rx module package is implemented by simply aligning a silicon ball lens, a photoconductive antenna and a focusing lens, and thus facilitates generation or measurement of a terahertz wave. The terahertz wave Tx/Rx module package and method can remarkably reduce time and cost required to build a terahertz wave generation and measurement system, and simplify and miniaturize the terahertz wave generation and measurement system. In addition, characteristics of a terahertz wave generated by the photoconductive antenna can be simply measured. Furthermore, the terahertz wave Tx/Rx module package can be stored and transported with a photoconductive antenna, a silicon ball lens and a focusing lens kept aligned as they are, and also it is possible to minimize pollution of terahertz wave devices caused by surroundings.

    摘要翻译: 提供了一种太赫兹波发送和接收(Tx / Rx)模块封装及其制造方法。 通过简单地对准硅球透镜,光电导天线和聚焦透镜来实现完整和单独的太赫兹波Tx / Rx模块封装,从而有助于太赫兹波的产生或测量。 太赫兹波Tx / Rx模块封装和方法可以显着降低构建太赫兹波生成和测量系统所需的时间和成本,并简化和小型化太赫兹波生成和测量系统。 此外,可以简单地测量由光电导天线产生的太赫兹波的特性。 此外,太赫兹波Tx / Rx模块封装可以用光电导天线,硅球透镜和聚焦透镜保持原样保持并传输,并且还可以最小化由周围环境引起的太赫兹波器件的污染。

    TUNABLE DIFFRACTION GRATING APPARATUS
    4.
    发明申请
    TUNABLE DIFFRACTION GRATING APPARATUS 审中-公开
    TUNNABLE DIFFRACTION GRATING APPARATUS

    公开(公告)号:US20100149640A1

    公开(公告)日:2010-06-17

    申请号:US12498893

    申请日:2009-07-07

    IPC分类号: G02B5/18

    CPC分类号: G02B5/1828

    摘要: Provided is a tunable diffraction grating apparatus including: a diffraction grating portion having a diffraction grating with an linearly variable grating interval, the diffraction grating being formed of an elastic member; a drive portion connected to the diffraction grating portion and applying a force to the diffraction grating portion to vary the grating interval; and a controller for controlling the drive portion to adjust the grating interval depending on a specific wavelength input from the exterior.Therefore, the tunable diffraction grating apparatus can vary a grating interval of a diffraction grating using an elastic material so that a signal of a frequency bandwidth of THz can also be used. In addition, it is possible to simplify structure of the apparatus to reduce the manufacturing cost thereof.

    摘要翻译: 本发明提供一种可调谐衍射光栅装置,包括:衍射光栅部分,具有具有线性可变光栅间隔的衍射光栅,衍射光栅由弹性部件形成; 连接到所述衍射光栅部分并且向所述衍射光栅部分施加力以改变所述光栅间隔的驱动部分; 以及控制器,用于根据从外部输入的特定波长来控制驱动部分来调整光栅间隔。 因此,可调谐衍射光栅装置可以使用弹性材料改变衍射光栅的光栅间隔,从而也可以使用THz的频率带宽的信号。 此外,可以简化装置的结构以降低其制造成本。

    Temperature Sensor Using Abrupt Metal-Insulator Transition (Mit) and Alarm Comprising the Temperature Sensor
    5.
    发明申请
    Temperature Sensor Using Abrupt Metal-Insulator Transition (Mit) and Alarm Comprising the Temperature Sensor 有权
    温度传感器使用突发金属绝缘体转换(Mit)和包含温度传感器的报警器

    公开(公告)号:US20080297358A1

    公开(公告)日:2008-12-04

    申请号:US12090084

    申请日:2006-06-27

    IPC分类号: G08B17/06 G01K7/16

    CPC分类号: G01K3/005 G01K7/22

    摘要: Provided are a temperature sensor using a metal-insulator transition (MIT) device subject to abrupt MIT at a specific temperature and an alarm including the temperature sensor. The abrupt MIT device includes an abrupt MIT thin film and at least two electrode thin films that contacts the abrupt MIT thin film. The abrupt MIT device generates abrupt metal-insulator transition at a specific transition temperature. The alarm includes a temperature sensor comprising an abrupt MIT device, and an alarm signaling device serially connected to the temperature sensor. Accordingly, the alarm can be manufactured to have a simple circuit and be of a small size by including the temperature sensor using an abrupt MIT device.

    摘要翻译: 提供了使用在特定温度下经受突然MIT的金属 - 绝缘体转变(MIT)装置的温度传感器和包括温度传感器的警报。 突变的MIT装置包括突变的MIT薄膜和至少两个接触突变的MIT薄膜的电极薄膜。 突变MIT器件在特定转变温度下产生突然的金属 - 绝缘体转变。 报警装置包括一个温度传感器,它包括一个突然的MIT装置,和一个串联连接到温度传感器的报警信号装置。 因此,通过使用突然的MIT装置包括温度传感器,可以将报警器制造成具有简单的电路并且尺寸小。

    Micro stage using piezoelectric element
    7.
    发明授权
    Micro stage using piezoelectric element 有权
    微电极采用压电元件

    公开(公告)号:US07732985B2

    公开(公告)日:2010-06-08

    申请号:US11231471

    申请日:2005-09-20

    IPC分类号: H01L41/00

    CPC分类号: H02N2/028 H01J2237/20264

    摘要: Provided is a micro stage comprising: a body having a vertically perforated through-hole passing through a central portion thereof; a bobbin including a tip portion with an electron emission tip embedded in the center thereof, and passing through the through-hole of the body to be moved in the through-hole along a first axis perpendicular to a vertical direction; a first piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in one direction along the first axis; a second piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in the other direction along the first axis; and an upper cover that is coupled to an upper portion of the body and has a through-hole, through which the bobbin passes and communicates with the through-hole of the body, wherein the bobbin can be positioned as desired along the first axis by adjusting the voltages applied to the first piezoelectric element and the second piezoelectric element. Accordingly, the emission tip can be exactly and stably positioned using only the movable piezoelectric elements.

    摘要翻译: 提供了一种微型台,包括:主体,其具有穿过其中心部分的垂直穿孔的通孔; 线轴,其包括具有嵌入其中心的电子发射尖端的尖端部分,并沿着垂直于垂直方向的第一轴线穿过所述通孔的待通孔; 第一压电元件,其设置在所述主体上,并且当施加电压时被延长以沿着所述第一轴线沿一个方向推动所述线轴; 第二压电元件,其设置在所述主体上并且当施加电压时被延长以沿着所述第一轴线沿另一方向推动所述线轴; 以及上盖,其联接到所述主体的上部并且具有通孔,所述筒管通过所述通孔,所述通孔与所述主体的所述通孔连通,其中所述线轴可根据需要沿着所述第一轴线由 调整施加到第一压电元件和第二压电元件的电压。 因此,可以仅使用可动压电元件来精确且稳定地定位发射尖端。

    Micro-column electron beam apparatus
    10.
    发明授权
    Micro-column electron beam apparatus 失效
    微柱电子束装置

    公开(公告)号:US07375351B2

    公开(公告)日:2008-05-20

    申请号:US11257244

    申请日:2005-10-24

    IPC分类号: G21G5/00

    摘要: Provided is a micro-column electron beam apparatus including: a base; an electron lens bracket on which an electron lens module can be fixed, mounted in a central portion of the base; an electron beam source tip module vertically disposed on the electron lens module; a pan spring plate stage module that is mounted over the base, supports the electron beam source tip module at a central portion thereof, and includes a three-coupling pan spring plate portion including first through third spring units that are coupled to the electron beam source tip module in three directions on a plane perpendicular to the vertical axis, which vertically passes the center of the electron beam source tip module, to elastically support the electron beam source tip module in three directions; a first piezoelectric actuator coupled to the pan spring plate stage module to move the electron beam source tip module along a first axis perpendicular to the vertical axis; and a second piezoelectric actuator coupled to the pan spring plate stage module to move the electron beam source tip module along a second axis perpendicular to the vertical axis and the first axis.

    摘要翻译: 本发明提供一种微柱电子束装置,包括:基底; 电子透镜支架,其上可以固定电子透镜模块,安装在基座的中心部分; 垂直设置在电子透镜模块上的电子束源头模块; 安装在基座上方的平板弹簧板台模块在其中心部分处支撑电子束源头模块,并且包括三联盘盘弹簧板部分,其包括耦合到电子束源的第一至第三弹簧单元 尖端模块在垂直于垂直轴线的平面上垂直通过电子束源头模块的中心,在三个方向弹性支撑电子束源头模块; 第一压电致动器,其联接到所述盘簧板模块以沿着垂直于所述垂直轴线的第一轴线移动所述电子束源尖端模块; 以及耦合到盘簧级模块的第二压电致动器,用于沿垂直于垂直轴线和第一轴线的第二轴线移动电子束源尖端模块。