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US07987591B2 Method of forming silicon chicklet pedestal 有权
形成硅芯座的方法

Method of forming silicon chicklet pedestal
Abstract:
A silicon chicklet pedestal for use in a wafer-level test probe of a wafer is provided and includes a main body, first and second opposing faces, and an array of vias formed through the main body to extend between the first and second faces, through which pairs of leads, respectively associated with each via at the first and second faces, are electrically connectable to one another.
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