发明授权
- 专利标题: Power MISFET, semiconductor device and DC/DC converter
- 专利标题(中): 电源MISFET,半导体器件和DC / DC转换器
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申请号: US12005918申请日: 2007-12-27
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公开(公告)号: US08319289B2公开(公告)日: 2012-11-27
- 发明人: Masaki Shiraishi , Noboru Akiyama , Takayuki Hashimoto
- 申请人: Masaki Shiraishi , Noboru Akiyama , Takayuki Hashimoto
- 申请人地址: JP Kawasaki
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Kawasaki
- 代理机构: Kilpatrick Townsend & Stockton LLP
- 优先权: JP2006-352737 20061227
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119
摘要:
A technique for suppressing lowering of withstand voltage and lowering of breakdown resistance and reducing a feedback capacitance of a power MISFET is provided. A lateral power MISFET that comprises a trench region whose insulating layer is formed shallower than an HV-Nwell layer is provided in the HV-Nwell layer (drift region) formed on a main surface of a semiconductor substrate in a direction from the main surface to the inside. The lateral power MISFET has an arrangement on a plane of the main surface including a source layer (source region) and a drain layer (drain region) arranged at opposite sides to each other across a gate electrode (first conducting layer), and a dummy gate electrode (second conducting layer) that is different from the gate electrode is arranged between the gate electrode and the drain layer.
公开/授权文献
- US20080180974A1 Power MISFET, semiconductor device and DC/DC converter 公开/授权日:2008-07-31
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