Invention Grant
- Patent Title: High compressive stress carbon liners for MOS devices
- Patent Title (中): 用于MOS器件的高压应力碳衬垫
-
Application No.: US13016660Application Date: 2011-01-28
-
Publication No.: US08362571B1Publication Date: 2013-01-29
- Inventor: Qingguo Wu , James S. Sims , Mandyam Sriram , Seshasayee Varadarajan , Haiying Fu , Pramod Subramonium , Jon Henri , Sirish Reddy
- Applicant: Qingguo Wu , James S. Sims , Mandyam Sriram , Seshasayee Varadarajan , Haiying Fu , Pramod Subramonium , Jon Henri , Sirish Reddy
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
Transistor architectures and fabrication processes generate channel strain without adversely impacting the efficiency of the transistor fabrication process while preserving the material quality and enhancing the performance of the resulting transistor. Transistor strain is generated is PMOS devices using a highly compressive post-salicide amorphous carbon capping layer applied as a blanket over on at least the source and drain regions. The stress from this capping layer is uniaxially transferred to the PMOS channel through the source-drain regions to create compressive strain in PMOS channel.
Information query
IPC分类: