发明授权
- 专利标题: High compressive stress carbon liners for MOS devices
- 专利标题(中): 用于MOS器件的高压应力碳衬垫
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申请号: US13016660申请日: 2011-01-28
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公开(公告)号: US08362571B1公开(公告)日: 2013-01-29
- 发明人: Qingguo Wu , James S. Sims , Mandyam Sriram , Seshasayee Varadarajan , Haiying Fu , Pramod Subramonium , Jon Henri , Sirish Reddy
- 申请人: Qingguo Wu , James S. Sims , Mandyam Sriram , Seshasayee Varadarajan , Haiying Fu , Pramod Subramonium , Jon Henri , Sirish Reddy
- 申请人地址: US CA San Jose
- 专利权人: Novellus Systems, Inc.
- 当前专利权人: Novellus Systems, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Weaver Austin Villeneuve & Sampson LLP
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
Transistor architectures and fabrication processes generate channel strain without adversely impacting the efficiency of the transistor fabrication process while preserving the material quality and enhancing the performance of the resulting transistor. Transistor strain is generated is PMOS devices using a highly compressive post-salicide amorphous carbon capping layer applied as a blanket over on at least the source and drain regions. The stress from this capping layer is uniaxially transferred to the PMOS channel through the source-drain regions to create compressive strain in PMOS channel.
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