发明授权
US08362571B1 High compressive stress carbon liners for MOS devices 失效
用于MOS器件的高压应力碳衬垫

High compressive stress carbon liners for MOS devices
摘要:
Transistor architectures and fabrication processes generate channel strain without adversely impacting the efficiency of the transistor fabrication process while preserving the material quality and enhancing the performance of the resulting transistor. Transistor strain is generated is PMOS devices using a highly compressive post-salicide amorphous carbon capping layer applied as a blanket over on at least the source and drain regions. The stress from this capping layer is uniaxially transferred to the PMOS channel through the source-drain regions to create compressive strain in PMOS channel.
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