Invention Grant
- Patent Title: Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves
- Patent Title (中): 使用高强度和高功率超声波增强等离子体表面改性
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Application No.: US12599775Application Date: 2008-05-09
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Publication No.: US08399795B2Publication Date: 2013-03-19
- Inventor: Niels Krebs , Alexander Bardenshtein , Yukihiro Kusano , Henrik Bindslev , Henrik Junge Mortensen
- Applicant: Niels Krebs , Alexander Bardenshtein , Yukihiro Kusano , Henrik Bindslev , Henrik Junge Mortensen
- Applicant Address: DK Brondby DK Kgs. Lyngby
- Assignee: Force Technology,Technical University of Denmark
- Current Assignee: Force Technology,Technical University of Denmark
- Current Assignee Address: DK Brondby DK Kgs. Lyngby
- Agency: Morrison & Foerster LLP
- Priority: DK200700717 20070511
- International Application: PCT/EP2008/055773 WO 20080509
- International Announcement: WO2008/138901 WO 20081120
- Main IPC: H05H1/24
- IPC: H05H1/24 ; B08B6/00 ; H05F3/00 ; A61F2/00 ; C23F1/00

Abstract:
This invention relates to a plasma surface modification process (and a corresponding a system) of a solid object (100) comprising creating plasma (104) by a plasma source (106), application of the plasma (104) to at least a part of a surface (314) of the solid object (100), generating ultrasonic high intensity and high power acoustic waves (102) by at least one ultrasonic high intensity and high power acoustic wave generator (101), wherein the ultrasonic acoustic waves are directed to propagate towards said surface (314) of the object (100) so that a laminar boundary layer (313) of a gas or a mixture of gases (500) flow in contact with said solid object (100) is thinned or destructed for at least a part of said surface (314). In this way, the plasma can more efficiently access and influence the surface of the solid object to be treated by the plasma, which speeds the process time up significantly.
Public/Granted literature
- US20100304146A1 ENHANCING PLASMA SURFACE MODIFICATION USING HIGH INTENSITY AND HIGH POWER ULTRASONIC ACOUSTIC WAVES Public/Granted day:2010-12-02
Information query
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