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US08598663B2 Semiconductor structure having NFET and PFET formed in SOI substrate with underlapped extensions 失效
具有NFET和PFET的半导体结构形成在具有延伸延伸的SOI衬底中

Semiconductor structure having NFET and PFET formed in SOI substrate with underlapped extensions
摘要:
A semiconductor structure which includes a semiconductor on insulator (SOI) substrate. The SOI substrate includes a base semiconductor layer; a buried oxide (BOX) layer in contact with the base semiconductor layer; and an SOI layer in contact with the BOX layer. The semiconductor structure further includes a circuit formed with respect to the SOI layer, the circuit including an N type field effect transistor (NFET) having source and drain extensions in the SOI layer and a gate; and a P type field effect transistor (PFET) having source and drain extensions in the SOI layer and a gate. There may also be a well under each of the NFET and PFET. There is a nonzero electrical bias being applied to the SOI substrate. One of the NFET extensions and PFET extensions may be underlapped with respect to the NFET gate or PFET gate, respectively.
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