Invention Grant
- Patent Title: Transfer apparatus and transfer method
- Patent Title (中): 传送装置和传送方法
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Application No.: US13716659Application Date: 2012-12-17
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Publication No.: US08707805B2Publication Date: 2014-04-29
- Inventor: Junnosuke Maki , Mitsuteru Yano , Seiji Nakano , Tsuyoshi Watanabe , Yasunori Toyoda , Suguru Enokida , Naruaki Iida , Hiroki Harada
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Posz Law Group, PLC
- Priority: JP2011-284213 20111226
- Main IPC: G01D7/00
- IPC: G01D7/00 ; G01L3/14

Abstract:
A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.
Public/Granted literature
- US20130166064A1 TRANSFER APPARATUS AND TRANSFER METHOD Public/Granted day:2013-06-27
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