公开(公告)号：US10916463B2

公开(公告)日：2021-02-09

申请号：US16802796

申请日：2020-02-27

Applicant: Tokyo Electron Limited

Inventor： Seiji Nakano

IPC: H01L21/67 ,  H01L21/677 ,  G03F7/16 ,  H01L21/66

Abstract: An apparatus includes first load ports 2A and 2B and second load ports 2C and 2D provided in a left-right direction; a processing unit D2; an inspection module 4 provided between the first load ports 2A and 2B and the second load ports 2C and 2D; a first substrate transfer mechanism 5A provided at one side of the inspection module 4 in the left-right direction, and configured to transfer a substrate W into the processing unit D2 and a transfer container C on the first load ports 2A and 2B; a second substrate transfer mechanism 5B provided at the other side thereof, and configured to transfer the substrate W into the inspection module 4 and a transfer container C on the second load ports 2C and 2D; and a transit unit 51 for transferring the substrate W between the first and the second substrate transfer mechanisms 5A and 5B.

公开(公告)号：US20170178935A1

公开(公告)日：2017-06-22

申请号：US15448882

申请日：2017-03-03

Applicant: Tokyo Electron Limited

Inventor： Katsuhiro Morikawa ,  Ikuo Sunaka ,  Seiji Nakano ,  Kazunori Kuratomi ,  Toshio Shimazu

IPC: H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67265 ,  B65G2201/0297 ,  H01L21/67772 ,  H01L21/67778

Abstract: A substrate transfer method is provided. The substrate transfer method comprises: loading the transfer container to a load port, and separating the cover body from the container main body; detecting an accommodation status of the substrate in the container main body by a detection unit; correcting, by a correction device, the accommodation status of the substrate in the container main body in which the accommodation status of the substrate detected by the detection unit is abnormal; and allowing a substrate transfer device to enter the container main body in which the accommodation status of the substrate is corrected, and unloading the substrate from the container main body.

公开(公告)号：US20140178162A1

公开(公告)日：2014-06-26

申请号：US14135988

申请日：2013-12-20

Applicant: Tokyo Electron Limited

Inventor： Katsuhiro Morikawa ,  Ikuo Sunaka ,  Seiji Nakano ,  Kazunori Kuratomi ,  Toshio Shimazu

IPC: H01L21/677

CPC classification number: H01L21/67265 ,  B65G2201/0297 ,  H01L21/67772 ,  H01L21/67778

Abstract: A substrate transfer apparatus unloads a substrate from a transfer container in which a cover body airtightly closes a substrate unloading opening formed at a front surface of a container main body and multiple substrates are accommodated in the form of shelves. The substrate transfer apparatus includes a load port to which the transfer container is loaded; a detection unit configured to detect an accommodation status of the substrate in the container main body that is loaded to the load port and separated from the cover body; a substrate transfer device configured to enter the container main body and unload the substrate; and a correction device configured to correct the accommodation status of the substrate in the container main body before the substrate is unloaded from the container main body by the substrate transfer device when the detection unit detects abnormality in the accommodation status.

Abstract translation: 基板传送装置从其中盖体气密地封闭形成在容器主体的前表面的基板卸载开口的转印容器卸载基板，并且多个基板以架子的形式容纳。 基板输送装置包括装载转印容器的装载口， 检测单元，被配置为检测装载到所述负载端口并与所述盖体分离的所述容器主体中的所述基板的调节状态; 基板转印装置，被配置为进入所述容器主体并卸载所述基板; 以及校正装置，其被配置为当所述检测单元检测到所述调节状态中的异常时，通过所述基板传送装置从所述容器主体卸载所述基板之前的所述基板在所述容器主体中的调节状态。

公开(公告)号：US08707805B2

公开(公告)日：2014-04-29

申请号：US13716659

申请日：2012-12-17

Applicant: Tokyo Electron Limited

Inventor： Junnosuke Maki ,  Mitsuteru Yano ,  Seiji Nakano ,  Tsuyoshi Watanabe ,  Yasunori Toyoda ,  Suguru Enokida ,  Naruaki Iida ,  Hiroki Harada

IPC: G01D7/00 ,  G01L3/14

CPC classification number: G06F17/00 ,  B25J13/085 ,  H01L21/67288 ,  H01L21/68707

Abstract: A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.

Abstract translation: 一种用于在被驱动装置上安装和传送传送部件的传送装置，所述传送装置包括：驱动装置，用于通过电动机的旋转驱动力旋转驱动侧滑轮，以使缠绕在驱动侧滑轮周围的皮带移动，从而移动 所述被驱动装置沿预定方向联接到所述带; 以及传送监视装置，用于监视被驱动装置的传送状态，其中转印监视装置检测移动被驱动装置所需的电动机的转矩值，基于时间计算转矩值相对于时间的转矩差值 检测转矩值，并使用计算出的转矩差分值来检测转印状态。

公开(公告)号：US12142483B2

公开(公告)日：2024-11-12

申请号：US17295480

申请日：2019-11-11

Applicant: Tokyo Electron Limited

Inventor： Yoshihiro Kawaguchi ,  Seiji Nakano ,  Munehisa Kodama ,  Hirotoshi Mori ,  Hayato Tanoue ,  Yohei Yamawaki

IPC: H01L21/304 ,  B24B7/22 ,  H01L21/683

Abstract: A substrate processing apparatus configured to process a substrate includes a substrate holder configured to hold, in a combined substrate in which a first substrate and a second substrate are bonded to each other, the second substrate; a periphery removing unit configured to remove, starting from a periphery modification layer formed on the first substrate along a boundary between a peripheral portion to be removed and a central portion of the first substrate, the peripheral portion from the combined substrate held by the substrate holder; and a collection unit equipped with a collection mechanism configured to collect the peripheral portion removed by the periphery removing unit.

公开(公告)号：US09627238B2

公开(公告)日：2017-04-18

申请号：US14135988

申请日：2013-12-20

Applicant: Tokyo Electron Limited

Inventor： Katsuhiro Morikawa ,  Ikuo Sunaka ,  Seiji Nakano ,  Kazunori Kuratomi ,  Toshio Shimazu

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67265 ,  B65G2201/0297 ,  H01L21/67772 ,  H01L21/67778

Abstract: A substrate transfer apparatus unloads a substrate from a transfer container in which a cover body airtightly closes a substrate unloading opening formed at a front surface of a container main body and multiple substrates are accommodated in the form of shelves. The substrate transfer apparatus includes a load port to which the transfer container is loaded; a detection unit configured to detect an accommodation status of the substrate in the container main body that is loaded to the load port and separated from the cover body; a substrate transfer device configured to enter the container main body and unload the substrate; and a correction device configured to correct the accommodation status of the substrate in the container main body before the substrate is unloaded from the container main body by the substrate transfer device when the detection unit detects abnormality in the accommodation status.

公开(公告)号：US20210118711A1

公开(公告)日：2021-04-22

申请号：US17136134

申请日：2020-12-29

Applicant: Tokyo Electron Limited

Inventor： Seiji Nakano

IPC: H01L21/67 ,  H01L21/677 ,  G03F7/16 ,  H01L21/66

Abstract: An apparatus includes first load ports 2A and 2B and second load ports 2C and 2D provided in a left-right direction; a processing unit D2; an inspection module 4 provided between the first load ports 2A and 2B and the second load ports 2C and 2D; a first substrate transfer mechanism 5A provided at one side of the inspection module 4 in the left-right direction, and configured to transfer a substrate W into the processing unit D2 and a transfer container C on the first load ports 2A and 2B; a second substrate transfer mechanism 5B provided at the other side thereof, and configured to transfer the substrate W into the inspection module 4 and a transfer container C on the second load ports 2C and 2D; and a transit unit 51 for transferring the substrate W between the first and the second substrate transfer mechanisms 5A and 5B.

公开(公告)号：US20180366356A1

公开(公告)日：2018-12-20

申请号：US16006007

申请日：2018-06-12

Applicant: Tokyo Electron Limited

Inventor： Seiji Nakano

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/66 ,  G03F7/16

Abstract: An apparatus includes first load ports 2A and 2B and second load ports 2C and 2D provided in a left-right direction; a processing unit D2; an inspection module 4 provided between the first load ports 2A and 2B and the second load ports 2C and 2D; a first substrate transfer mechanism 5A provided at one side of the inspection module 4 in the left-right direction, and configured to transfer a substrate W into the processing unit D2 and a transfer container C on the first load ports 2A and 2B; a second substrate transfer mechanism 5B provided at the other side thereof, and configured to transfer the substrate W into the inspection module 4 and a transfer container C on the second load ports 2C and 2D; and a transit unit 51 for transferring the substrate W between the first and the second substrate transfer mechanisms 5A and 5B.

公开(公告)号：US10128138B2

公开(公告)日：2018-11-13

申请号：US15448882

申请日：2017-03-03

Applicant: Tokyo Electron Limited

Inventor： Katsuhiro Morikawa ,  Ikuo Sunaka ,  Seiji Nakano ,  Kazunori Kuratomi ,  Toshio Shimazu

IPC: H01L21/67 ,  H01L21/677

Abstract: A substrate transfer method is provided. The substrate transfer method comprises: loading the transfer container to a load port, and separating the cover body from the container main body; detecting an accommodation status of the substrate in the container main body by a detection unit; correcting, by a correction device, the accommodation status of the substrate in the container main body in which the accommodation status of the substrate detected by the detection unit is abnormal; and allowing a substrate transfer device to enter the container main body in which the accommodation status of the substrate is corrected, and unloading the substrate from the container main body.

公开(公告)号：US20130166064A1

公开(公告)日：2013-06-27

申请号：US13716659

申请日：2012-12-17

Applicant: Tokyo Electron Limited

Inventor： Junnosuke Maki ,  Mitsuteru Yano ,  Seiji Nakano ,  Tsuyoshi Watanabe ,  Yasunori Toyoda ,  Suguru Enokida ,  Naruaki Iida ,  Hiroki Harada

IPC: G06F17/00

CPC classification number: G06F17/00 ,  B25J13/085 ,  H01L21/67288 ,  H01L21/68707

Abstract: A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.

Abstract translation: 一种用于在被驱动装置上安装和传送传送部件的传送装置，所述传送装置包括：驱动装置，用于通过电动机的旋转驱动力旋转驱动侧滑轮，以使缠绕在驱动侧滑轮周围的皮带移动，从而移动 所述被驱动装置沿预定方向联接到所述带; 以及传送监视装置，用于监视被驱动装置的传送状态，其中转印监视装置检测移动被驱动装置所需的电动机的转矩值，基于时间计算转矩值相对于时间的转矩差值 检测转矩值，并使用计算出的转矩差分值来检测转印状态。