公开(公告)号：US20240175131A1

公开(公告)日：2024-05-30

申请号：US18427992

申请日：2024-01-31

Applicant: Tokyo Electron Limited

Inventor： Ryo Araki ,  Junnosuke Maki ,  Mitsuteru Yano ,  Masato Hayashi

IPC: C23C16/455 ,  B05B12/00 ,  C23C16/46

CPC classification number: C23C16/45563 ,  B05B12/004 ,  C23C16/45557 ,  C23C16/463

Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.

公开(公告)号：US20130166064A1

公开(公告)日：2013-06-27

申请号：US13716659

申请日：2012-12-17

Applicant: Tokyo Electron Limited

Inventor： Junnosuke Maki ,  Mitsuteru Yano ,  Seiji Nakano ,  Tsuyoshi Watanabe ,  Yasunori Toyoda ,  Suguru Enokida ,  Naruaki Iida ,  Hiroki Harada

IPC: G06F17/00

CPC classification number: G06F17/00 ,  B25J13/085 ,  H01L21/67288 ,  H01L21/68707

Abstract: A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.

Abstract translation: 一种用于在被驱动装置上安装和传送传送部件的传送装置，所述传送装置包括：驱动装置，用于通过电动机的旋转驱动力旋转驱动侧滑轮，以使缠绕在驱动侧滑轮周围的皮带移动，从而移动 所述被驱动装置沿预定方向联接到所述带; 以及传送监视装置，用于监视被驱动装置的传送状态，其中转印监视装置检测移动被驱动装置所需的电动机的转矩值，基于时间计算转矩值相对于时间的转矩差值 检测转矩值，并使用计算出的转矩差分值来检测转印状态。

公开(公告)号：US20220112601A1

公开(公告)日：2022-04-14

申请号：US17498886

申请日：2021-10-12

Applicant: Tokyo Electron Limited

Inventor： Ryo Araki ,  Junnosuke Maki ,  Mitsuteru Yano ,  Masato Hayashi

IPC: C23C16/455 ,  C23C16/46

Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.

公开(公告)号：US11920240B2

公开(公告)日：2024-03-05

申请号：US17498886

申请日：2021-10-12

Applicant: Tokyo Electron Limited

Inventor： Ryo Araki ,  Junnosuke Maki ,  Mitsuteru Yano ,  Masato Hayashi

IPC: C23C16/455 ,  B05B12/00 ,  C23C16/46

CPC classification number: C23C16/45563 ,  B05B12/004 ,  C23C16/45557 ,  C23C16/463

Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.

公开(公告)号：US08707805B2

公开(公告)日：2014-04-29

申请号：US13716659

申请日：2012-12-17

Applicant: Tokyo Electron Limited

Inventor： Junnosuke Maki ,  Mitsuteru Yano ,  Seiji Nakano ,  Tsuyoshi Watanabe ,  Yasunori Toyoda ,  Suguru Enokida ,  Naruaki Iida ,  Hiroki Harada

IPC: G01D7/00 ,  G01L3/14

CPC classification number: G06F17/00 ,  B25J13/085 ,  H01L21/67288 ,  H01L21/68707

Abstract: A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.

Abstract translation: 一种用于在被驱动装置上安装和传送传送部件的传送装置，所述传送装置包括：驱动装置，用于通过电动机的旋转驱动力旋转驱动侧滑轮，以使缠绕在驱动侧滑轮周围的皮带移动，从而移动 所述被驱动装置沿预定方向联接到所述带; 以及传送监视装置，用于监视被驱动装置的传送状态，其中转印监视装置检测移动被驱动装置所需的电动机的转矩值，基于时间计算转矩值相对于时间的转矩差值 检测转矩值，并使用计算出的转矩差分值来检测转印状态。