发明授权
- 专利标题: Integrated circuit transistors with multipart gate conductors
- 专利标题(中): 具有多部分栅极导体的集成电路晶体管
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申请号: US12324791申请日: 2008-11-26
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公开(公告)号: US08735983B2公开(公告)日: 2014-05-27
- 发明人: Jun Liu , Albert Ratnakumar , Qi Xiang , Jeffrey Xiaoqi Tung
- 申请人: Jun Liu , Albert Ratnakumar , Qi Xiang , Jeffrey Xiaoqi Tung
- 申请人地址: US CA San Jose
- 专利权人: Altera Corporation
- 当前专利权人: Altera Corporation
- 当前专利权人地址: US CA San Jose
- 代理机构: Treyz Law Group
- 代理商 G. Victor Treyz; Chih-Yun Wu
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L21/336 ; H01L21/8238 ; H01L29/66 ; H01L21/28 ; H01L29/49
摘要:
Metal-oxide-semiconductor transistors are provided. A metal-oxide-semiconductor transistor may be formed on a semiconductor substrate. Source and drain regions may be formed in the substrate. A gate insulator such as a high-K dielectric may be formed between the source and drain regions. A gate may be formed from multiple gate conductors. The gate conductors may be metals with different workfunctions. A first of the gate conductors may form a pair of edge gate conductors that are adjacent to dielectric spacers. An opening between the edge gate conductors may be filled with the second gate conductor to form a center gate conductor. A self-aligned gate formation process may be used in fabricating the metal-oxide-semiconductor transistor.
公开/授权文献
- US20100127332A1 INTEGRATED CIRCUIT TRANSISTORS 公开/授权日:2010-05-27
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