Invention Grant
- Patent Title: Electroplating apparatus for tailored uniformity profile
- Patent Title (中): 用于定制均匀性曲线的电镀设备
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Application No.: US13438443Application Date: 2012-04-03
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Publication No.: US08858774B2Publication Date: 2014-10-14
- Inventor: Steven T. Mayer , David W. Porter , Bryan L. Buckalew , Robert Rash
- Applicant: Steven T. Mayer , David W. Porter , Bryan L. Buckalew , Robert Rash
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D21/12 ; C25D7/12 ; C25D5/18 ; H01L21/288 ; C25D17/12 ; C25D21/10 ; H01L21/768

Abstract:
Methods of electroplating metal on a substrate while controlling azimuthal uniformity, include, in one aspect, providing the substrate to the electroplating apparatus configured for rotating the substrate during electroplating, and electroplating the metal on the substrate while rotating the substrate relative to a shield such that a selected portion of the substrate at a selected azimuthal position dwells in a shielded area for a different amount of time than a second portion of the substrate having the same average arc length and the same average radial position and residing at a different angular (azimuthal) position. For example, a semiconductor wafer substrate can be rotated during electroplating slower or faster, when the selected portion of the substrate passes through the shielded area.
Public/Granted literature
- US20120258408A1 ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE Public/Granted day:2012-10-11
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