Invention Grant
US08894826B2 Copper indium gallium selenide (CIGS) thin films with composition controlled by co-sputtering 有权
铜铟镓硒(CIGS)薄膜,其组成通过共溅射控制

Copper indium gallium selenide (CIGS) thin films with composition controlled by co-sputtering
Abstract:
A method and apparatus for forming a thin film of a copper indium gallium selenide (CIGS)-type material are disclosed. The method includes providing first and second targets in a common sputtering chamber. The first target includes a source of CIGS material, such as an approximately stoichiometric polycrystalline CIGS material, and the second target includes a chalcogen, such as selenium, sulfur, tellurium, or a combination of these elements. The second target provides an excess of chalcogen in the chamber. This can compensate, at least in part, for the loss of chalcogen from the CIGS-source in the first target, resulting in a thin film with a controlled stoichiometry which provides effective light absorption when used in a solar cell.
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