Invention Grant
US08894826B2 Copper indium gallium selenide (CIGS) thin films with composition controlled by co-sputtering
有权
铜铟镓硒(CIGS)薄膜,其组成通过共溅射控制
- Patent Title: Copper indium gallium selenide (CIGS) thin films with composition controlled by co-sputtering
- Patent Title (中): 铜铟镓硒(CIGS)薄膜,其组成通过共溅射控制
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Application No.: US12884524Application Date: 2010-09-17
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Publication No.: US08894826B2Publication Date: 2014-11-25
- Inventor: Jesse A. Frantz , Jasbinder S. Sanghera , Robel Y. Bekele , Vinh Q Nguyen , Ishwar D. Aggarwal , Allan J. Bruce , Michael Cyrus , Sergey V. Frolov
- Applicant: Jesse A. Frantz , Jasbinder S. Sanghera , Robel Y. Bekele , Vinh Q Nguyen , Ishwar D. Aggarwal , Allan J. Bruce , Michael Cyrus , Sergey V. Frolov
- Agency: US Naval Research Laboratory
- Agent Rebecca L. Forman
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/32 ; C25B9/00 ; C25B11/00 ; C25B13/00 ; B05D5/06 ; B05D5/12 ; H01L21/00 ; C23C14/06 ; H01L31/18 ; H01L31/0368 ; H01L31/0392 ; H01L21/02 ; C23C14/34

Abstract:
A method and apparatus for forming a thin film of a copper indium gallium selenide (CIGS)-type material are disclosed. The method includes providing first and second targets in a common sputtering chamber. The first target includes a source of CIGS material, such as an approximately stoichiometric polycrystalline CIGS material, and the second target includes a chalcogen, such as selenium, sulfur, tellurium, or a combination of these elements. The second target provides an excess of chalcogen in the chamber. This can compensate, at least in part, for the loss of chalcogen from the CIGS-source in the first target, resulting in a thin film with a controlled stoichiometry which provides effective light absorption when used in a solar cell.
Public/Granted literature
- US20110067757A1 COPPER INDIUM GALLIUM SELENIDE (CIGS) THIN FILMS WITH COMPOSITION CONTROLLED BY CO-SPUTTERING Public/Granted day:2011-03-24
Information query
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