Invention Grant
- Patent Title: Methods of forming gates of semiconductor devices
- Patent Title (中): 形成半导体器件栅极的方法
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Application No.: US14264622Application Date: 2014-04-29
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Publication No.: US08962415B2Publication Date: 2015-02-24
- Inventor: Jong-Won Lee , Bo-Un Yoon , Seung-Jae Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, PA
- Priority: KR10-2010-0097326 20101006
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/28 ; H01L29/423 ; H01L29/49 ; H01L29/51 ; H01L29/66

Abstract:
Methods of forming gates of semiconductor devices are provided. The methods may include forming a first recess in a first substrate region having a first conductivity type and forming a second recess in a second substrate region having a second conductivity type. The methods may also include forming a high-k layer in the first and second recesses. The methods may further include providing a first metal on the high-k layer in the first and second substrate regions, the first metal being provided within the second recess. The methods may additionally include removing at least portions of the first metal from the second recess while protecting materials within the first recess from removal. The methods may also include, after removing at least portions of the first metal from the second recess, providing a second metal within the second recess.
Public/Granted literature
- US20140235047A1 METHODS OF FORMING GATES OF SEMICONDUCTOR DEVICES Public/Granted day:2014-08-21
Information query
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