Invention Grant
- Patent Title: Multi-gate semiconductor devices and methods of forming the same
- Patent Title (中): 多栅半导体器件及其形成方法
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Application No.: US14108391Application Date: 2013-12-17
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Publication No.: US08981479B2Publication Date: 2015-03-17
- Inventor: Chih-Ching Wang , Jon-Hsu Ho , Ching-Fang Huang , Wen-Hsing Hsieh , Tsung-Hsing Yu , Yi-Ming Sheu , Ken-Ichi Goto , Zhiqiang Wu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/78 ; H01L21/8234 ; H01L21/8238 ; H01L27/088 ; H01L27/092 ; H01L29/66

Abstract:
A multi-gate semiconductor device and method for forming the same. A multi-gate semiconductor device is formed including a first fin of a first transistor formed on a semiconductor substrate having a first dopant type. The first transistor has a doped channel region of the first dopant type. The device also includes a second fin of a second transistor formed on the first dopant type semiconductor substrate. The second transistor has a doped channel region of a second dopant type. The device further includes a gate electrode layer of the second dopant type formed over the channel region of the first fin and a gate electrode layer of the first dopant type formed over the channel region of the second fin.
Public/Granted literature
- US20140103438A1 MULTI-GATE SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME Public/Granted day:2014-04-17
Information query
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