Invention Grant
US08985050B2 Substrate laser oxide removal process followed by electro or immersion plating 有权
基板激光氧化物去除工艺,然后电镀或浸镀

Substrate laser oxide removal process followed by electro or immersion plating
Abstract:
Method of ablating the surface of a substrate including providing a dry substrate and an electrolyte source, ablating the surface of the dry substrate to at least partially remove a native oxide layer, and immersing the ablated dry substrate in the electrolyte source, in which the dry substrate is ablated prior to being introduced into the electrolyte source. Also provided is a method of ablating the surface of a substrate that includes providing a dry substrate and an electrolyte, depositing a portion of the electrolyte on the substrate at a thickness of less than 10 microns and ablating the surface of the substrate with the electrolyte applied thereon. System for use in the ablation of the surface of a substrate are also provided.
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