Invention Grant
- Patent Title: Logic chip including embedded magnetic tunnel junctions
- Patent Title (中): 逻辑芯片包括嵌入式磁隧道结
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Application No.: US13994716Application Date: 2013-03-15
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Publication No.: US09041146B2Publication Date: 2015-05-26
- Inventor: Kevin J. Lee , Tahir Ghani , Joseph M. Steigerwald , John H. Epple , Yih Wang
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- International Application: PCT/US2013/032151 WO 20130315
- International Announcement: WO2014/142978 WO 20140918
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/12 ; H01L43/08 ; H01L27/22

Abstract:
An embodiment integrates memory, such as spin-torque transfer magnetoresistive random access memory (STT-MRAM) within a logic chip. The STT-MRAM includes a magnetic tunnel junction (MTJ) with an upper MTJ layer, lower MTJ layer, and tunnel barrier directly contacting the upper MTJ layer and the lower MTJ layer; wherein the upper MTJ layer includes an upper MTJ layer sidewall and the lower MTJ layer includes a lower MTJ sidewall horizontally offset from the upper MTJ layer. Another embodiment includes a memory area, comprising a MTJ, and a logic area located on a substrate; wherein a horizontal plane intersects the MTJ, a first Inter-Layer Dielectric (ILD) material adjacent the MTJ, and a second ILD material included in the logic area, the first and second ILD materials being unequal to one another. In an embodiment the first and second ILDs directly contact one another. Other embodiments are described herein.
Public/Granted literature
- US20140264679A1 LOGIC CHIP INCLUDING EMBEDDED MAGNETIC TUNNEL JUNCTIONS Public/Granted day:2014-09-18
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