Invention Grant
- Patent Title: Tunable filter structures and design structures
- Patent Title (中): 可调滤波器结构和设计结构
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Application No.: US13292729Application Date: 2011-11-09
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Publication No.: US09054671B2Publication Date: 2015-06-09
- Inventor: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Mark D. Jaffe , Robert K. Leidy , Anthony K. Stamper
- Applicant: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Mark D. Jaffe , Robert K. Leidy , Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H03H9/00
- IPC: H03H9/00 ; H03H9/17 ; H03H9/56 ; H03H9/05 ; H01L41/00 ; H03H9/02

Abstract:
Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.
Public/Granted literature
- US20130113577A1 TUNABLE FILTER STRUCTURES AND DESIGN STRUCTURES Public/Granted day:2013-05-09
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