Invention Grant
US09054671B2 Tunable filter structures and design structures 有权
可调滤波器结构和设计结构

Tunable filter structures and design structures
Abstract:
Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.
Public/Granted literature
Information query
Patent Agency Ranking
0/0