发明授权
US09058455B2 Backside integration of RF filters for RF front end modules and design structure
有权
用于RF前端模块的RF滤波器的背面集成和设计结构
- 专利标题: Backside integration of RF filters for RF front end modules and design structure
- 专利标题(中): 用于RF前端模块的RF滤波器的背面集成和设计结构
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申请号: US13354705申请日: 2012-01-20
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公开(公告)号: US09058455B2公开(公告)日: 2015-06-16
- 发明人: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- 申请人: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Roberts Mlotkowski Safran & Cole, P.C.
- 代理商 Anthony Canale
- 主分类号: G06F17/50
- IPC分类号: G06F17/50 ; H01L21/768 ; H01L23/48 ; H03H9/64 ; H01L23/00 ; H01L27/06 ; H01L49/02 ; H01L23/66 ; H01L25/16
摘要:
A design structure for an integrated radio frequency (RF) filter on a backside of a semiconductor substrate includes: a device on a first side of a substrate; a radio frequency (RF) filter on a backside of the substrate; and at least one substrate conductor extending from the front side of the substrate to the backside of the substrate and electrically coupling the RF filter to the device.
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