Invention Grant
US09082593B2 Electrode having gas discharge function and plasma processing apparatus
有权
具有气体放电功能的电极和等离子体处理装置
- Patent Title: Electrode having gas discharge function and plasma processing apparatus
- Patent Title (中): 具有气体放电功能的电极和等离子体处理装置
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Application No.: US13435689Application Date: 2012-03-30
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Publication No.: US09082593B2Publication Date: 2015-07-14
- Inventor: Daisuke Hayashi , Toshifumi Ishida , Norihiko Amikura
- Applicant: Daisuke Hayashi , Toshifumi Ishida , Norihiko Amikura
- Applicant Address: JP
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP
- Agency: Cantor Colburn LLP
- Priority: JP2011-078214 20110331; JP2012-073431 20120328
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/50 ; C23C16/503 ; C23C16/505 ; C23C16/509 ; C23F1/00 ; H01J37/32 ; H01J1/02 ; C23F1/12 ; H01J1/00

Abstract:
An electrode having a gas discharge function, where the degree of freedom related to a maximum gas flow rate is abundant, an electrode cover member may be thinned, and a change of a gas behavior according to time is difficult to be generated in a processing chamber during gas introduction. The electrode includes: a base material having a plurality of gas holes; and an electrode cover member having a plurality of gas holes respectively corresponding to the plurality of gas holes of the base material in a one-to-one manner, fixed to the base material, and disposed facing a processing space in which the object is plasma-processed, wherein a gas hole diameter of the electrode cover member is larger than a gas hole diameter of the base material.
Public/Granted literature
- US20120247673A1 ELECTRODE HAVING GAS DISCHARGE FUNCTION AND PLASMA PROCESSING APPARATUS Public/Granted day:2012-10-04
Information query
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