发明授权
US09099502B2 Chemical-liquid mixing method and chemical-liquid mixing apparatus
有权
化学 - 液体混合方法和药液混合装置
- 专利标题: Chemical-liquid mixing method and chemical-liquid mixing apparatus
- 专利标题(中): 化学 - 液体混合方法和药液混合装置
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申请号: US11882402申请日: 2007-08-01
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公开(公告)号: US09099502B2公开(公告)日: 2015-08-04
- 发明人: Hiroshi Tanaka , Koukichi Hiroshiro , Fumihiro Kamimura
- 申请人: Hiroshi Tanaka , Koukichi Hiroshiro , Fumihiro Kamimura
- 申请人地址: JP Tokyo-To
- 专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Tokyo-To
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2006-211732 20060803
- 主分类号: B01F15/02
- IPC分类号: B01F15/02 ; H01L21/67 ; B01F3/08 ; B01F5/10 ; B01F15/00 ; B01F15/04 ; C01B15/08 ; C11D3/39 ; C11D11/00
摘要:
The present invention provides a chemical-liquid mixing method and a chemical-liquid mixing apparatus capable of sufficiently generating a peroxomonosulfuric acid that is effective in removing a resist from a substrate, when a sulfuric acid and a hydrogen peroxide solution are mixed with each other. At first, an inner tank 10 is filled up with a sulfuric acid and the sulfuric acid overflowing from the inner tank 10 is allowed to flow into an outer tank 12. Then, a hydrogen peroxide solution is supplied into the inner tank 10 and the hydrogen peroxide solution is allowed to flow into the outer tank 12 whereby the two kinds of liquids of the hydrogen peroxide solution and the sulfuric acid are stored in the outer tank 12. Simultaneously when the hydrogen peroxide solution flows into the outer tank 12, a return pump 16 is activated.
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