Invention Grant
- Patent Title: Polishing agent and method for polishing substrate using the polishing agent
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Application No.: US13891064Application Date: 2013-05-09
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Publication No.: US09129900B2Publication Date: 2015-09-08
- Inventor: Yousuke Hoshi , Daisuke Ryuzaki , Naoyuki Koyama , Shigeru Nobe
- Applicant: Hitachi Chemical Company, Ltd.
- Applicant Address: JP
- Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee Address: JP
- Agency: Fitch, Even, Tabin & Flannery
- Priority: JP2008-112443 20080423; JP2008-112444 20080423; JP2008-112445 20080423; JP2008-301277 20081126; JP2008-301285 20081126; JP2008-301298 20081126
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/306 ; B24B37/04 ; C09K3/14 ; H01L21/3105

Abstract:
Disclosed is a polishing agent comprising: water; tetravalent metal hydroxide particles; and an additive, wherein the additive contains at least one of a cationic polymer and a cationic polysaccharide. The present invention can provide a polishing agent which is capable of polishing an insulating film at a high speed with less polishing flaws, and having a high polishing rate ratio of a silicon oxide film and a stopper film, in the CMP technology of flattening insulating film. The present invention can also provide a polishing agent set for storing the polishing agent, and a method for polishing a substrate using this polishing agent.
Public/Granted literature
- US09165777B2 Polishing agent and method for polishing substrate using the polishing agent Public/Granted day:2015-10-20
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