Invention Grant
- Patent Title: Deposition of patterned organic thin films
- Patent Title (中): 图案化有机薄膜的沉积
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Application No.: US13896744Application Date: 2013-05-17
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Publication No.: US09178184B2Publication Date: 2015-11-03
- Inventor: Gregory McGraw , Paul E. Burrows , Siddharth Harikrishna Mohan
- Applicant: UNIVERSAL DISPLAY CORPORATION
- Applicant Address: US NJ Ewing
- Assignee: UNIVERSAL DISPLAY CORPORATION
- Current Assignee: UNIVERSAL DISPLAY CORPORATION
- Current Assignee Address: US NJ Ewing
- Agency: Morris & Kamlay LLP
- Main IPC: B05C5/00
- IPC: B05C5/00 ; B05B7/06 ; H01L51/56 ; C23C14/12 ; C23C14/22 ; H01L51/00

Abstract:
Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.
Public/Granted literature
- US20140235012A1 DEPOSITION OF PATTERNED ORGANIC THIN FILMS Public/Granted day:2014-08-21
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