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US09178184B2 Deposition of patterned organic thin films 有权
图案化有机薄膜的沉积

Deposition of patterned organic thin films
Abstract:
Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.
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