公开(公告)号：US09871229B2

公开(公告)日：2018-01-16

申请号：US14972932

申请日：2015-12-17

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Siddharth Harikrishna Mohan ,  Paul E. Burrows

IPC: H01L21/00 ,  H01L51/56 ,  H01L51/00 ,  C23C14/24 ,  C23C14/56 ,  B05B1/00 ,  H01L51/50

CPC classification number: H01L51/56 ,  B05B1/005 ,  C23C14/24 ,  C23C14/56 ,  H01L51/0005 ,  H01L51/0013 ,  H01L51/50

Abstract: An emissive layer deposited in graded manner using a plurality of nozzles is disclosed. A mixtures ejected from the plurality of nozzles may contain varying concentrations of host-to-dopant material. The nozzles, as disclosed, may be arranged in a sequential manner such that the order of the sequence is based on varying concentration of the host-to-dopant material. The nozzles may be configured to translate relative to an area of a substrate to allow sequential deposition.

公开(公告)号：US09397312B2

公开(公告)日：2016-07-19

申请号：US13788321

申请日：2013-03-07

Applicant: Universal Display Corporation

Inventor： Peter Levermore ,  Huiqing Pang ,  Emory Krall ,  Rajan Kamala ,  Ruiqing Ma ,  Paul E. Burrows

IPC: H01L51/00 ,  H01L51/52 ,  H01L51/50 ,  H01L51/56 ,  H05B33/10 ,  C23C14/04 ,  C23C14/24 ,  H01L27/32

CPC classification number: H01L51/5203 ,  C23C14/042 ,  C23C14/24 ,  H01L27/3202 ,  H01L27/3204 ,  H01L27/3279 ,  H01L27/329 ,  H01L51/0023 ,  H01L51/0097 ,  H01L51/50 ,  H01L51/5016 ,  H01L51/5212 ,  H01L51/5228 ,  H01L51/56 ,  H01L2251/5338 ,  H01L2251/5361 ,  H01L2251/5392 ,  H05B33/10

Abstract: Systems and methods for the design and fabrication of OLEDs, including high-performance large-area OLEDs, are provided. Variously described fabrication processes may be used to deposit and pattern bus lines with a smooth profile and a gradual sidewall transition. Such smooth profiles may, for example, reduce the probability of electrical shorting at the bus lines. Accordingly, in certain circumstances, an insulating layer may no longer be considered essential, and may be optionally avoided altogether. In cases where an insulating layer is not used, further enhancements in the emissive area and shelf life of the device may be achieved as well. According to aspects of the invention, bus lines such as those described herein may be deposited, and patterned, using vapor deposition such as vacuum thermal evaporation (VTE) through a shadow mask, and may avoid multiple photolithography steps. Other vapor deposition systems and methods may include, among others, sputter deposition, e-beam evaporation and chemical vapor deposition (CVD). A final profile of the bus line may substantially correspond to the profile as deposited.

公开(公告)号：US08962383B2

公开(公告)日：2015-02-24

申请号：US14246737

申请日：2014-04-07

Applicant: Universal Display Corporation

Inventor： Siddarth Harikrishna Mohan ,  Paul E. Burrows

IPC: H01L51/40 ,  H01L51/00 ,  H01L51/56

CPC classification number: H01L51/0003 ,  C23C14/04 ,  C23C14/12 ,  C23C14/228 ,  H01L51/0005 ,  H01L51/56

Abstract: Systems and methods are provided for depositing thin patterned films of materials in which individual elements of the patterned film are deposited by two or more nozzles having different geometries. The different nozzle geometries may include one or more of different throttle diameters, different exhaust diameters, different cross-sectional shapes, different bore angles, different wall angles, different exhaust distances from the substrate, and different leading edges relative to the direction of movement of the nozzles or the substrate. Methods may include steps of ejecting a carrier gas and a material from a plurality of nozzles and depositing the material on a substrate in a plurality of laterally spaced elements.

Abstract translation: 提供了用于沉积材料的薄图案化膜的系统和方法，其中通过具有不同几何形状的两个或更多个喷嘴沉积图案化膜的各个元件。 不同的喷嘴几何形状可以包括一个或多个不同的节流直径，不同的排气直径，不同的横截面形状，不同的孔角度，不同的壁角度，与基板的不同排气距离以及相对于运动方向的不同前缘 喷嘴或基板。 方法可以包括从多个喷嘴喷射载气和材料并将材料沉积在多个横向间隔的元件的基板上的步骤。

公开(公告)号：US20140235012A1

公开(公告)日：2014-08-21

申请号：US13896744

申请日：2013-05-17

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Gregory McGraw ,  Paul E. Burrows ,  Siddharth Harikrishna Mohan

IPC: H01L51/00 ,  H01L51/56 ,  B05B7/02

CPC classification number: H01L51/56 ,  C23C14/12 ,  C23C14/22 ,  C23C14/228 ,  H01L51/0004 ,  Y02E10/549

Abstract: Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.

Abstract translation: 本文公开的实施例提供具有具有一个或多个喷嘴的喷嘴模具的装置，每个喷嘴具有一个或多个集成的撇渣器。 使用集成的喷嘴/分离器结构允许在OVJP型沉积技术中进行更高分辨率的打印，而不需要通过允许相对狭窄的有机材料束而使用阴影掩模，该有机材料束可以距离基板相对高的距离放置 。

公开(公告)号：US11205751B2

公开(公告)日：2021-12-21

申请号：US15723343

申请日：2017-10-03

Applicant: Universal Display Corporation

Inventor： Siddharth Harikrishna Mohan ,  Paul E. Burrows

IPC: B05B1/34 ,  H01L51/00 ,  H01L51/56

Abstract: Nozzle designs which have been found to be effective in governing overspray in OVJP are provided. Aspects of the invention have been found to be effective in reducing or avoiding sudden pressure drops at the end of the nozzle close to the substrate, and may be advantageously employed in obtaining, for example, greater consistency between the nozzle outlet diameter and the deposited pattern width.

公开(公告)号：US09741968B2

公开(公告)日：2017-08-22

申请号：US13895892

申请日：2013-05-16

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Paul E. Burrows ,  Emory Krall ,  Huiqing Pang ,  Jason Paynter ,  Kamala Rajan ,  Ruiqing Ma ,  Gregory McGraw

IPC: H01L51/52 ,  F21S8/06 ,  F21V3/04 ,  F21V17/12 ,  F21V17/00 ,  F21Y105/00 ,  F21Y115/15

CPC classification number: H01L51/5275 ,  F21S8/06 ,  F21V3/062 ,  F21V5/008 ,  F21V17/002 ,  F21V17/12 ,  F21Y2105/00 ,  F21Y2115/15

Abstract: Luminaires and luminaire components are provided that may include emissive, index-matching, and/or outcoupling components that are replaceable separately from other components of the luminaire. In some embodiments, an index-matching component may include a gel sheet or pad that can be disposed between an emissive component and an outcoupling component. The index-matching component may be replaceable separately from the emissive and outcoupling components. In some embodiments, an emissive component including an OLED panel and/or an index-matching component may be replaceable separately from other components of the luminaire.

公开(公告)号：US09530962B2

公开(公告)日：2016-12-27

申请号：US15048163

申请日：2016-02-19

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Siddharth Harikrishna Mohan ,  Paul E. Burrows ,  Julia J. Brown

IPC: H01L21/00 ,  H01L51/00 ,  H01L51/56 ,  H01L51/50 ,  H01L27/32

CPC classification number: H01L51/0005 ,  H01L27/3206 ,  H01L27/3209 ,  H01L27/3211 ,  H01L51/0008 ,  H01L51/5004 ,  H01L51/5016 ,  H01L51/5036 ,  H01L51/5056 ,  H01L51/5064 ,  H01L51/5072 ,  H01L51/508 ,  H01L51/5088 ,  H01L51/525 ,  H01L51/5253 ,  H01L51/5265 ,  H01L51/56 ,  H01L2227/323 ,  H01L2251/558

Abstract: Methods of fabricating a device having laterally patterned first and second sub-devices, such as subpixels of an OLED, are provided. Exemplary methods may include depositing via organic vapor jet printing (OVJP) a first organic layer of the first sub-device and a first organic layer of the second sub-device. The first organic layer of the first sub-device and the first organic layer of the second sub-device are both the same type of layer, but have different thicknesses. The type of layer is selected from an ETL, an HTL, an HIL, a spacer and a capping layer.

公开(公告)号：US09450027B2

公开(公告)日：2016-09-20

申请号：US14557939

申请日：2014-12-02

Applicant: Universal Display Corporation

Inventor： Huiqing Pang ,  Peter Levermore ,  Emory Krall ,  Kamala Rajan ,  Ruiqing Ma ,  Paul E. Burrows

IPC: H01L27/32 ,  H01L51/52 ,  B82Y10/00 ,  H01L23/525 ,  H01L23/528 ,  H01L51/50 ,  H01L51/00

CPC classification number: H01L27/3202 ,  B82Y10/00 ,  H01L23/5256 ,  H01L23/528 ,  H01L27/3204 ,  H01L51/0046 ,  H01L51/0058 ,  H01L51/0067 ,  H01L51/0068 ,  H01L51/0072 ,  H01L51/008 ,  H01L51/0092 ,  H01L51/5012 ,  H01L51/5203 ,  H01L51/5206 ,  H01L51/5212 ,  H01L51/5221 ,  H01L51/5228 ,  H01L2051/0063 ,  H01L2251/5361 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Systems, and methods for the design and fabrication of OLEDs, including large-area OLEDs with metal bus lines, are provided. For a given panel area dimension, target luminous emittance, OLED device structure and efficiency, and electrical resistivity and thickness of the bus line material and electrode onto which the bus lines are disposed, a bus line pattern may be designed to optimize Fill Factor (FF), Luminance Uniformity (U) and Power Loss (PL). Example designs may be to maximize FF, maximize U and minimize PL. or define minimum criteria for U and a maximum criteria for PL, and then to optimize the bus line layout to maximize FF. OLED panels including bus lines with different resistances along the bus line are also described.

Abstract translation: 提供了用于OLED的设计和制造的系统和方法，包括具有金属总线线路的大面积OLED。 对于给定的面板面积尺寸，目标发光度，OLED器件结构和效率以及布置有总线线路的总线材料和电极的电阻率和厚度，可以设计总线图案以优化填充因子（FF ），亮度均匀度（U）和功率损耗（PL）。 示例设计可能是最大化FF，最大化U并最小化PL。 或定义U的最小标准和PL的最大标准，然后优化总线布局以使FF最大化。 还描述了包括沿总线具有不同电阻的总线的OLED面板。

公开(公告)号：US20150171374A1

公开(公告)日：2015-06-18

申请号：US14106274

申请日：2013-12-13

Applicant: Universal Display Corporation

Inventor： Paul E. Burrows ,  Ruiqing Ma ,  Gregory McGraw ,  Huiqing Pang

IPC: H01L51/52 ,  H01L51/56

CPC classification number: H01L51/5271 ,  F21S8/065 ,  F21Y2105/00 ,  F21Y2115/15 ,  H01L51/0097 ,  H01L51/5275 ,  H01L51/56 ,  H01L2251/5338 ,  H01L2251/5361

Abstract: Devices and components are provided that include a curved outcoupling component and an OLED, where the outcoupling component provides up to 100% outcoupling of light emitted by the OLED into air. The outcoupling component has an outer radius R and includes a material with a refractive index n. The OLED is in optical communication with the outcoupling component and disposed such that each emissive element of the OLED is within a distance r measured from the center of curvature of the surface at the outer radius R, such that R−r>(n−1)r.

Abstract translation: 提供了包括弯曲外耦合部件和OLED的器件和部件，其中外耦合部件提供高达100％的由OLED发射的空气与空气的耦合。 外耦合元件具有外半径R并且包括具有折射率n的材料。 OLED与外耦合部件光学通信，并且被布置为使得OLED的每个发光元件在距外表面的曲率中心测量的距离r内，使得R-r>（n-1） ）r。

公开(公告)号：US20160315260A1

公开(公告)日：2016-10-27

申请号：US15048163

申请日：2016-02-19

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Siddharth Harikrishna Mohan ,  Paul E. Burrows ,  Julia J. Brown

IPC: H01L51/00 ,  H01L51/50 ,  H01L27/32 ,  H01L51/56

CPC classification number: H01L51/0005 ,  H01L27/3206 ,  H01L27/3209 ,  H01L27/3211 ,  H01L51/0008 ,  H01L51/5004 ,  H01L51/5016 ,  H01L51/5036 ,  H01L51/5056 ,  H01L51/5064 ,  H01L51/5072 ,  H01L51/508 ,  H01L51/5088 ,  H01L51/525 ,  H01L51/5253 ,  H01L51/5265 ,  H01L51/56 ,  H01L2227/323 ,  H01L2251/558

Abstract: Methods of fabricating a device having laterally patterned first and second sub-devices, such as subpixels of an OLED, are provided. Exemplary methods may include depositing via organic vapor jet printing (OVJP) a first organic layer of the first sub-device and a first organic layer of the second sub-device. The first organic layer of the first sub-device and the first organic layer of the second sub-device are both the same type of layer, but have different thicknesses. The type of layer is selected from an ETL, an HTL, an HIL, a space and a capping layer.

Abstract translation: 提供了制造具有横向图案化的第一和第二子装置（例如OLED的子像素）的装置的方法。 示例性方法可以包括通过有机蒸汽喷射印刷（OVJP）沉积第一子装置的第一有机层和第二子装置的第一有机层。 第一子装置的第一有机层和第二子装置的第一有机层是相同类型的层，但具有不同的厚度。 层的类型选自ETL，HTL，HIL，空格和封盖层。