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公开(公告)号:US11584991B2
公开(公告)日:2023-02-21
申请号:US16891148
申请日:2020-06-03
Applicant: Universal Display Corporation
Inventor: Gregory McGraw , William E. Quinn , Gregg Kottas , Siddharth Harikrishna Mohan , Matthew King
IPC: C23C16/455 , C23C14/12 , H01L51/00 , C23C14/24 , B41J2/00
Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.
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公开(公告)号:US11205751B2
公开(公告)日:2021-12-21
申请号:US15723343
申请日:2017-10-03
Applicant: Universal Display Corporation
Inventor: Siddharth Harikrishna Mohan , Paul E. Burrows
Abstract: Nozzle designs which have been found to be effective in governing overspray in OVJP are provided. Aspects of the invention have been found to be effective in reducing or avoiding sudden pressure drops at the end of the nozzle close to the substrate, and may be advantageously employed in obtaining, for example, greater consistency between the nozzle outlet diameter and the deposited pattern width.
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公开(公告)号:US20210351350A1
公开(公告)日:2021-11-11
申请号:US17380169
申请日:2021-07-20
Applicant: Universal Display Corporation
Inventor: William E. Quinn , Siddharth Harikrishna Mohan , Gregory McGraw , Xin Xu
Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.
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公开(公告)号:US09876192B2
公开(公告)日:2018-01-23
申请号:US15310577
申请日:2015-05-12
Applicant: Universal Display Corporation
Inventor: Siddharth Harikrishna Mohan , William E. Quinn
CPC classification number: H01L51/5253 , H01L51/5246 , H01L51/56
Abstract: A barrier film on an organic electronic device. The barrier film comprises an inorganic polymeric silicon composition having Si—O—Si bonds which exhibit an asymmetric stretching Si-0 vibration frequency (AS1) ranging between 1200 cm−1 and 1000 cm−1, Si—O—H vibration frequency ranging between 950 cm−1 and 810 cm−1 and an —O—H ranging between 3400 cm−1 and 3700 cm−1 in which the ratio of peak areas for Si—O—H and —O—H vibration frequencies compared to the peak area of the Si—O—Si vibration frequency is less than 0.15. The barrier film exhibits a water vapor transmission rate between 1×10−2 g/m−2 day and 1×10−8 g/m−2 day.
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公开(公告)号:US20170077451A1
公开(公告)日:2017-03-16
申请号:US15310577
申请日:2015-05-12
Applicant: Universal Display Corporation
Inventor: Siddharth Harikrishna Mohan , William E. Quinn
CPC classification number: H01L51/5253 , H01L51/5246 , H01L51/56
Abstract: A barrier film on an organic electronic device. The barrier film comprises an inorganic polymeric silicon composition having Si—O—Si bonds which exhibit an asymmetric stretching Si—0 vibration frequency (AS1) ranging between 1200 cm−1 and 1000 cm−1, Si—O—H vibration frequency ranging between 950 cm−1 and 810 cm−1 and an —O—H ranging between 3400 cm−1 and 3700 cm−1 in which the ratio of peak areas for Si—O—H and —O—H vibration frequencies compared to the peak area of the Si—O—Si vibration frequency is less than 0.15. The barrier film exhibits a water vapor transmission rate between 1×10−2 g/m−2 day and 1×10−8 g/m−2 day.
Abstract translation: 有机电子器件上的阻挡膜。 阻挡膜包括具有Si-O-Si键的无机聚合硅组合物,其表现出在1200cm -1和1000cm -1之间的不对称拉伸Si-0振动频率(AS1),Si-O-H振动频率范围在 950 cm-1和810 cm-1,以及在3400 cm-1到3700 cm-1之间的-O-H范围,其中Si-O-H和-O-H振动频率的峰面积与峰值 Si-O-Si振动频率的面积小于0.15。 阻挡膜的水蒸气透过率为1×10 -2 g / m -2,1天为10〜10 g / m〜2。
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公开(公告)号:US09530962B2
公开(公告)日:2016-12-27
申请号:US15048163
申请日:2016-02-19
Applicant: UNIVERSAL DISPLAY CORPORATION
Inventor: Siddharth Harikrishna Mohan , Paul E. Burrows , Julia J. Brown
CPC classification number: H01L51/0005 , H01L27/3206 , H01L27/3209 , H01L27/3211 , H01L51/0008 , H01L51/5004 , H01L51/5016 , H01L51/5036 , H01L51/5056 , H01L51/5064 , H01L51/5072 , H01L51/508 , H01L51/5088 , H01L51/525 , H01L51/5253 , H01L51/5265 , H01L51/56 , H01L2227/323 , H01L2251/558
Abstract: Methods of fabricating a device having laterally patterned first and second sub-devices, such as subpixels of an OLED, are provided. Exemplary methods may include depositing via organic vapor jet printing (OVJP) a first organic layer of the first sub-device and a first organic layer of the second sub-device. The first organic layer of the first sub-device and the first organic layer of the second sub-device are both the same type of layer, but have different thicknesses. The type of layer is selected from an ETL, an HTL, an HIL, a spacer and a capping layer.
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公开(公告)号:US20130334510A1
公开(公告)日:2013-12-19
申请号:US13917137
申请日:2013-06-13
Applicant: Universal Display Corporation
Inventor: Prashant Mandlik , Ruiqing Ma , Siddharth Harikrishna Mohan
IPC: H01L51/52
CPC classification number: H01L51/5203 , H01L51/50 , H01L51/52 , H01L51/5212 , H01L51/5253
Abstract: Embodiments of the present invention provide electronic devices such as OLEDs that have enhanced mechanical integrity and prolonged shelf, by minimizing the spread of a delamination region using topographical non-uniformities introduced in the device structure. For example, a device may be made deliberately non-planar by introducing multiple energy barriers which can prevent or minimize the propagation of a delamination, because the delamination will have to cross the energy barriers in order to spread to a larger area.
Abstract translation: 本发明的实施例通过使用在设备结构中引入的形貌不均匀性最小化分层区域的扩展来提供诸如具有增强的机械完整性和延长搁架的OLED的电子器件。 例如,通过引入可以防止或最小化分层的传播的多个能量屏障,可以有意地制造非平面装置,因为分层必须穿过能量屏障以扩散到更大的区域。
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公开(公告)号:US11267012B2
公开(公告)日:2022-03-08
申请号:US14643887
申请日:2015-03-10
Applicant: Universal Display Corporation
Inventor: Gregory McGraw , William E. Quinn , Matthew King , Elliot H. Hartford, Jr. , Siddharth Harikrishna Mohan
Abstract: Embodiments of the disclosed subject matter provide a device including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, and a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel.
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公开(公告)号:US11220737B2
公开(公告)日:2022-01-11
申请号:US14730768
申请日:2015-06-04
Applicant: Universal Display Corporation
Inventor: Gregory McGraw , William E. Quinn , Matthew King , Elliot H. Hartford, Jr. , Siddharth Harikrishna Mohan , Benjamin Swedlove , Gregg Kottas
Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.
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公开(公告)号:US10910590B2
公开(公告)日:2021-02-02
申请号:US14661335
申请日:2015-03-18
Applicant: UNIVERSAL DISPLAY CORPORATION
Inventor: Siddharth Harikrishna Mohan , William E. Quinn , Ruiqing Ma , Emory Krall , Luke Walski
Abstract: A novel thin film encapsulated OLED panel architecture and a method for making the panels with improved shelf life is disclosed. The OLED panel consists of a plurality of OLED pixels; each OLED pixel is individually hermetically sealed and isolated from its neighboring pixels. The organic stack of the OLED pixel is contained within its own hermetically sealed structure, achieved by making the structure on a barrier coated substrate and using a first barrier material as the grid and a second barrier for encapsulating the entire OLED pixel. The first barrier material provides the edge seal while the second barrier disposed over the pixel provides protection from top down moisture diffusion. By isolating and hermetically sealing individual pixels; any damage such as moisture and oxygen ingress due to defects or particles, delamination, cracking etc. can be effectively contained within the pixel thereby protecting other pixels in the panel.
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