Invention Grant
- Patent Title: Metal gate transistor
- Patent Title (中): 金属栅晶体管
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Application No.: US14025833Application Date: 2013-09-13
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Publication No.: US09196546B2Publication Date: 2015-11-24
- Inventor: Shih-Fang Tzou , Chien-Ming Lai , Yi-Wen Chen , Hung-Yi Wu , Tong-Jyun Huang , Chien-Ting Lin , Chun-Hsien Lin
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L21/8238

Abstract:
A metal gate transistor is disclosed. The metal gate transistor includes a substrate, a metal gate on the substrate, and a source/drain region in the substrate. The metal gate further includes a high-k dielectric layer, a bottom barrier metal (BBM) layer on the high-k dielectric layer, a first work function layer on the BBM layer, a second work function layer between the BBM layer and the first work function layer, and a low resistance metal layer on the first work function layer. Preferably, the first work function layer includes a p-type work function layer and the second work function layer includes a n-type work function layer.
Public/Granted literature
- US20150076623A1 METAL GATE TRANSISTOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2015-03-19
Information query
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