Invention Grant
- Patent Title: Waveguide devices with supporting anchors
- Patent Title (中): 带支撑锚的波导装置
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Application No.: US14278689Application Date: 2014-05-15
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Publication No.: US09274277B2Publication Date: 2016-03-01
- Inventor: Brennan J. Brown , James R. Elliott , Qizhi Liu , Steven M. Shank
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts, Mlotkowski, Safran & Cole PC
- Agent Michael LeStrange; Andrew M. Calderon
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/125 ; G02B6/132 ; G02B6/136 ; H01L31/0232 ; H01L33/58
Abstract:
Si waveguide devices on a bulk Si substrate with supporting anchors and methods of manufacture are disclosed. The method includes forming a waveguide device over an Si substrate, and forming one or more anchors from the Si substrate. The one or more anchors support the waveguide device.
Public/Granted literature
- US20150331183A1 WAVEGUIDE DEVICES WITH SUPPORTING ANCHORS Public/Granted day:2015-11-19
Information query
