Invention Grant
US09287308B2 Image sensor having metal contact coupled through a contact etch stop layer with an isolation region
有权
图像传感器具有通过具有隔离区域的接触蚀刻停止层耦合的金属接触
- Patent Title: Image sensor having metal contact coupled through a contact etch stop layer with an isolation region
- Patent Title (中): 图像传感器具有通过具有隔离区域的接触蚀刻停止层耦合的金属接触
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Application No.: US13858754Application Date: 2013-04-08
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Publication No.: US09287308B2Publication Date: 2016-03-15
- Inventor: Sing-Chung Hu , Dajiang Yang , Oray Orkun Cellek , Hsin-Chih Tai , Gang Chen
- Applicant: OMNIVISION TECHNOLOGIES, INC.
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L27/146

Abstract:
An image sensor pixel includes one or more photodiodes disposed in a semiconductor layer. Pixel circuitry is disposed in the semiconductor layer coupled to the one or more photodiodes. A passivation layer is disposed proximate to the semiconductor layer over the pixel circuitry and the one or more photodiodes. A contact etch stop layer is disposed over the passivation layer. One or more metal contacts are coupled to the pixel circuitry through the contact etch stop layer. One or more isolation regions are defined in the contact etch stop layer that isolate contact etch stop layer material through which the one or more metal contacts are coupled are coupled to the pixel circuitry from the one or more photodiodes.
Public/Granted literature
- US20140299957A1 IMAGE SENSOR HAVING METAL CONTACT COUPLED THROUGH A CONTACT ETCH STOP LAYER WITH AN ISOLATION REGION Public/Granted day:2014-10-09
Information query
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