Invention Grant
US09296085B2 Polishing pad with homogeneous body having discrete protrusions thereon
有权
具有均匀体的抛光垫,其上具有离散的突起
- Patent Title: Polishing pad with homogeneous body having discrete protrusions thereon
- Patent Title (中): 具有均匀体的抛光垫,其上具有离散的突起
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Application No.: US14530534Application Date: 2014-10-31
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Publication No.: US09296085B2Publication Date: 2016-03-29
- Inventor: Rajeev Bajaj , Ping Huang , Robert Kerprich , William C. Allison , Richard Frentzel , Diane Scott
- Applicant: Rajeev Bajaj , Ping Huang , Robert Kerprich , William C. Allison , Richard Frentzel , Diane Scott
- Applicant Address: US OR Hillsboro
- Assignee: NexPlanar Corporation
- Current Assignee: NexPlanar Corporation
- Current Assignee Address: US OR Hillsboro
- Agent Thomas Omholt; Arlene Hornilla; Justin Brask
- Main IPC: B24B37/26
- IPC: B24B37/26 ; B24B37/20 ; B24B37/22 ; B24B37/24 ; B24D18/00 ; B29C39/12 ; B29K75/00 ; B29L9/00 ; B29L31/00

Abstract:
Polishing pads with homogeneous bodies having discrete protrusions thereon are described. In an example, a polishing pad for polishing a substrate includes a homogeneous body having a polishing side and a back side. The homogeneous body is composed of a material having a first hardness. A plurality of discrete protrusions is disposed on and covalently bonded with the polishing side of the homogeneous body. The plurality of discrete protrusions is composed of a material having a second hardness different from the first hardness. Methods of fabricating polishing pads with homogeneous bodies having discrete protrusions thereon are also described.
Public/Granted literature
- US20150056900A1 POLISHING PAD WITH HOMOGENEOUS BODY HAVING DISCRETE PROTRUSIONS THEREON Public/Granted day:2015-02-26
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