Invention Grant
US09296085B2 Polishing pad with homogeneous body having discrete protrusions thereon 有权
具有均匀体的抛光垫,其上具有离散的突起

Polishing pad with homogeneous body having discrete protrusions thereon
Abstract:
Polishing pads with homogeneous bodies having discrete protrusions thereon are described. In an example, a polishing pad for polishing a substrate includes a homogeneous body having a polishing side and a back side. The homogeneous body is composed of a material having a first hardness. A plurality of discrete protrusions is disposed on and covalently bonded with the polishing side of the homogeneous body. The plurality of discrete protrusions is composed of a material having a second hardness different from the first hardness. Methods of fabricating polishing pads with homogeneous bodies having discrete protrusions thereon are also described.
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