Invention Grant
US09299826B2 Memory device and method of manufacturing the same 有权
存储器件及其制造方法

Memory device and method of manufacturing the same
Abstract:
A memory device includes a gate structure, a contact plug, and a spacer. The gate structure includes first and second conductive layer patterns sequentially stacked on a substrate. The contact plug passes through the second conductive layer pattern, and a sidewall of the contact plug directly contacts at least a portion of the second conductive layer pattern. The spacer surrounds a portion of the sidewall of the contact plug and contacting the gate structure.
Public/Granted literature
Information query
Patent Agency Ranking
0/0