Invention Grant
- Patent Title: Memory device and method of manufacturing the same
- Patent Title (中): 存储器件及其制造方法
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Application No.: US14204441Application Date: 2014-03-11
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Publication No.: US09299826B2Publication Date: 2016-03-29
- Inventor: Hauk Han , Il-Woo Kim , Jeong-Gil Lee , Yong-Il Kwon , Myoung-Bum Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2013-0026790 20130313
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/78 ; H01L29/66 ; H01L27/115 ; H01L21/768

Abstract:
A memory device includes a gate structure, a contact plug, and a spacer. The gate structure includes first and second conductive layer patterns sequentially stacked on a substrate. The contact plug passes through the second conductive layer pattern, and a sidewall of the contact plug directly contacts at least a portion of the second conductive layer pattern. The spacer surrounds a portion of the sidewall of the contact plug and contacting the gate structure.
Public/Granted literature
- US20140264498A1 MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-09-18
Information query
IPC分类: