Invention Grant
US09330994B2 Semiconductor device and method of forming RDL and vertical interconnect by laser direct structuring
有权
半导体器件和通过激光直接结构形成RDL和垂直互连的方法
- Patent Title: Semiconductor device and method of forming RDL and vertical interconnect by laser direct structuring
- Patent Title (中): 半导体器件和通过激光直接结构形成RDL和垂直互连的方法
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Application No.: US14228531Application Date: 2014-03-28
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Publication No.: US09330994B2Publication Date: 2016-05-03
- Inventor: Zigmund R. Camacho , Bartholomew Liao , Sheila Marie L. Alvarez , HeeJo Chi , Kelvin Dao
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L23/31 ; H01L21/56 ; H01L21/768 ; H01L23/00 ; H01L23/498 ; H01L21/48 ; H01L23/538

Abstract:
A semiconductor device has a semiconductor die and encapsulant deposited over the semiconductor die. An insulating layer is formed over the semiconductor die and encapsulant. A first channel including a first conductive surface is formed in the insulating layer by laser radiation. A laser-activated catalyst is infused in the insulating layer to form the first conductive surface in the first channel upon laser radiation. A vertical interconnect is formed through the encapsulant. A first conductive layer is formed in the first channel over the first conductive surface. A second channel including a second conductive surface is formed in the encapsulant by laser radiation. The catalyst is infused in the encapsulant to form the second conductive surface in the second channel upon laser radiation. A second conductive layer is formed in the second channel over the second conductive surface. An interconnect structure is formed over the first conductive layer.
Public/Granted literature
- US20150279778A1 Semiconductor Device and Method of Forming RDL and Vertical Interconnect by Laser Direct Structuring Public/Granted day:2015-10-01
Information query
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