Invention Grant
US09387428B2 Systems and methods for treating flammable effluent gases from manufacturing processes
有权
用于处理来自制造过程的易燃废气的系统和方法
- Patent Title: Systems and methods for treating flammable effluent gases from manufacturing processes
- Patent Title (中): 用于处理来自制造过程的易燃废气的系统和方法
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Application No.: US12365886Application Date: 2009-02-04
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Publication No.: US09387428B2Publication Date: 2016-07-12
- Inventor: Daniel O. Clark , Mehran Moalem , Robbert M. Vermeulen , Phil Chandler
- Applicant: Daniel O. Clark , Mehran Moalem , Robbert M. Vermeulen , Phil Chandler
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: B01D53/00
- IPC: B01D53/00 ; B01D53/40
Abstract:
A system for treating flammable effluent gas is provided. The system includes an exhaust conduit to carry the flammable effluent gas to an abatement unit, a control system coupled to the abatement unit to determine an operating parameter of the abatement unit, a bypass valve coupled to the exhaust conduit which is an operative responsive to the monitoring system, and a source of second gas to be mixed with the effluent gas diverted from the abatement unit when the bypass valve is operating in a bypass mode to provide a mixed gas having a flammability lower than the effluent gas. Methods of the invention as well as numerous other aspects are provided.
Public/Granted literature
- US20090216061A1 SYSTEMS AND METHODS FOR TREATING FLAMMABLE EFFLUENT GASES FROM MANUFACTURING PROCESSES Public/Granted day:2009-08-27
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