Invention Grant
US09412859B2 Contact geometry having a gate silicon length decoupled from a transistor length
有权
具有与晶体管长度分离的栅极硅长度的接触几何形状
- Patent Title: Contact geometry having a gate silicon length decoupled from a transistor length
- Patent Title (中): 具有与晶体管长度分离的栅极硅长度的接触几何形状
-
Application No.: US13792730Application Date: 2013-03-11
-
Publication No.: US09412859B2Publication Date: 2016-08-09
- Inventor: Ralf Richter , Peter Javorka , Jan Hoentschel , Stefan Flachowsky
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/28 ; H01L29/66 ; H01L29/423 ; H01L29/49 ; H01L29/51

Abstract:
Methods for forming a semiconductor device are provided. In one embodiment, a gate structure having a gate insulating layer and a gate electrode structure formed on the gate insulating layer is provided. The methods provide reducing a dimension of the gate electrode structure relative to the gate insulating layer along a direction extending in parallel to a direction connecting the source and drain. A semiconductor device structure having a gate structure including a gate insulating layer and a gate electrode structure formed above the gate insulating layer is provided, wherein a dimension of the gate electrode structure extending along a direction which is substantially parallel to a direction being oriented from source to drain is reduced relative to a dimension of the gate insulating layer. According to some examples, gate structures are provided having a gate silicon length which is decoupled from the channel width induced by the gate structure.
Public/Granted literature
- US20140252429A1 CONTACT GEOMETRY HAVING A GATE SILICON LENGTH DECOUPLED FROM A TRANSISTOR LENGTH Public/Granted day:2014-09-11
Information query
IPC分类: