Invention Grant
US09436098B2 Maskless exposure device, maskless exposure method and display substrate manufactured by the maskless exposure device and the maskless exposure method
有权
无掩模曝光装置，无掩模曝光方法和由无掩模曝光装置制造的显示基板和无掩模曝光方法
- Patent Title: Maskless exposure device, maskless exposure method and display substrate manufactured by the maskless exposure device and the maskless exposure method
- Patent Title (中): 无掩模曝光装置，无掩模曝光方法和由无掩模曝光装置制造的显示基板和无掩模曝光方法
-
Application No.: US14635339Application Date: 2015-03-02
-
Publication No.: US09436098B2Publication Date: 2016-09-06
- Inventor: Jung-Chul Heo , Hi-Kuk Lee , Jae-Hyuk Chang , Sang-Hyun Lee , Jung-In Park , Sang-Hyun Yun , Ki-Beom Lee , Hyun-Seok Kim , Kab-Jong Seo , Jun-Ho Sim , Byoung-Min Yun , Sang-Don Jang , Jae-Young Jang , Chang-Hoon Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2014-0121017 20140912
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L29/786 ; H01L27/12
Abstract:
A maskless exposure device includes an exposure head including a digital micro-mirror device. The digital micro-mirror device is configured to transmit a source beam applied from an exposure source to a substrate. A system control part is configured to control the digital micro-mirror device by using a graphic data system file. The graphic data system file includes data for forming a source electrode, a drain electrode and a channel portion disposed between the source electrode and the drain electrode. The graphic system file includes data for forming the channel portion extending in a diagonal direction with respect to a scan direction of the exposure head.
Public/Granted literature
Information query
IPC分类:
