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US09456501B2 Nanowire grid structure having grid patterns and a sacrificial layer 有权
具有栅格图案和牺牲层的纳米线栅格结构

Nanowire grid structure having grid patterns and a sacrificial layer
Abstract:
Provided is a method of manufacturing a nanowire, including: forming a plurality of grid patterns on a grid base layer; forming a sacrificial layer on the grid base layer on which the grid patterns are formed; producing a nanowire grid structure by forming a nanowire base layer on the sacrificial layer; forming a nanowire by wet etching the nanowire base layer; and separating the grid patterns from the nanowire by etching the sacrificial layer.
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