Invention Grant
US09456501B2 Nanowire grid structure having grid patterns and a sacrificial layer
有权
具有栅格图案和牺牲层的纳米线栅格结构
- Patent Title: Nanowire grid structure having grid patterns and a sacrificial layer
- Patent Title (中): 具有栅格图案和牺牲层的纳米线栅格结构
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Application No.: US14365506Application Date: 2012-12-06
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Publication No.: US09456501B2Publication Date: 2016-09-27
- Inventor: Young Jae Lee , Kyoung Jong Yoo , Jin Su Kim , Jun Lee
- Applicant: LG INNOTEK CO., LTD.
- Applicant Address: KR Seoul
- Assignee: LG INNOTEK CO., LTD.
- Current Assignee: LG INNOTEK CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: KR10-2011-0133325 20111213
- International Application: PCT/KR2012/010518 WO 20121206
- International Announcement: WO2013/089388 WO 20130620
- Main IPC: H05K1/09
- IPC: H05K1/09 ; H05K3/46 ; H05K3/16 ; H05K3/00 ; B81C99/00 ; H01L29/06 ; H05K1/02 ; H05K3/06 ; H05K3/10 ; H05K3/14

Abstract:
Provided is a method of manufacturing a nanowire, including: forming a plurality of grid patterns on a grid base layer; forming a sacrificial layer on the grid base layer on which the grid patterns are formed; producing a nanowire grid structure by forming a nanowire base layer on the sacrificial layer; forming a nanowire by wet etching the nanowire base layer; and separating the grid patterns from the nanowire by etching the sacrificial layer.
Public/Granted literature
- US20150000963A1 NANOWIRE GRID STRUCTURE Public/Granted day:2015-01-01
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