Invention Grant
- Patent Title: Word line repair for 3D vertical channel memory
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Application No.: US14949650Application Date: 2015-11-23
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Publication No.: US09472286B2Publication Date: 2016-10-18
- Inventor: Shih-Hung Chen
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Yiding Wu
- Main IPC: G11C29/44
- IPC: G11C29/44 ; G11C11/418 ; G11C5/02 ; G11C5/06 ; G11C8/10 ; G11C16/08 ; G11C16/04 ; H01L27/115 ; H01L21/768 ; G11C8/14 ; G11C16/10 ; G11C16/26 ; G11C29/00 ; G11C13/00 ; G11C29/12

Abstract:
A memory device includes a plurality of stacks of conductive strips alternating with insulating strips, including at least a bottom plane of conductive strips, a plurality of intermediate planes of conductive strips, a top plane of conductive strips, and an additional intermediate plane. A plurality of vertical structures is arranged orthogonally to the plurality of stacks. Memory elements are disposed in interface regions at cross-points between side surfaces of the plurality of stacks and the plurality of vertical structures. A stack of linking elements is connected to conductive strips in respective intermediate planes and to the additional intermediate plane. Decoding circuitry is coupled to the plurality of intermediate planes and the additional intermediate plane, and is configured to replace an intermediate plane indicated to be defective with the additional intermediate plane.
Public/Granted literature
- US20160078944A1 WORD LINE REPAIR FOR 3D VERTICAL CHANNEL MEMORY Public/Granted day:2016-03-17
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