Invention Grant
US09558548B2 Method, system, and computer program product for detection of defects based on multiple references 有权
基于多个参考的检测缺陷的方法,系统和计算机程序产品

Method, system, and computer program product for detection of defects based on multiple references
Abstract:
A system includes a memory and a processor device operatively coupled to the memory to obtain an inspected noise-indicative value representative of an analyzed pixel of an inspected image of an inspected object, and a reference noise-indicative value representative for each of multiple reference pixels of the inspected image. The processor device computes a representative noise-indicative value based on the inspected noise-indicative value and multiple reference noise-indicative values, calculates a defect-indicative value based on an inspected value representative of the analyzed pixel and determines a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.
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