Invention Grant
US09558548B2 Method, system, and computer program product for detection of defects based on multiple references
有权
基于多个参考的检测缺陷的方法,系统和计算机程序产品
- Patent Title: Method, system, and computer program product for detection of defects based on multiple references
- Patent Title (中): 基于多个参考的检测缺陷的方法,系统和计算机程序产品
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Application No.: US14738370Application Date: 2015-06-12
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Publication No.: US09558548B2Publication Date: 2017-01-31
- Inventor: Moshe Amzaleg , Yehuda Cohen , Nir Ben-David Dodzen , Efrat Rozenman
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: US IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: US IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00 ; H01L21/67

Abstract:
A system includes a memory and a processor device operatively coupled to the memory to obtain an inspected noise-indicative value representative of an analyzed pixel of an inspected image of an inspected object, and a reference noise-indicative value representative for each of multiple reference pixels of the inspected image. The processor device computes a representative noise-indicative value based on the inspected noise-indicative value and multiple reference noise-indicative values, calculates a defect-indicative value based on an inspected value representative of the analyzed pixel and determines a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.
Public/Granted literature
- US20150287178A1 METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR DETECTION OF DEFECTS BASED ON MULTIPLE REFERENCES Public/Granted day:2015-10-08
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