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1.发明授权Method, system, and computer program product for detection of defects based on multiple references 有权基于多个参考的检测缺陷的方法，系统和计算机程序产品公开(公告)号：US09558548B2
公开(公告)日：2017-01-31
申请号：US14738370
申请日：2015-06-12
Applicant: Applied Materials Israel Ltd.
Inventor： Moshe Amzaleg , Yehuda Cohen , Nir Ben-David Dodzen , Efrat Rozenman
CPC classification number: G06T7/001 , G06T7/0002 , G06T2207/30148 , H01L21/67288
Abstract: A system includes a memory and a processor device operatively coupled to the memory to obtain an inspected noise-indicative value representative of an analyzed pixel of an inspected image of an inspected object, and a reference noise-indicative value representative for each of multiple reference pixels of the inspected image. The processor device computes a representative noise-indicative value based on the inspected noise-indicative value and multiple reference noise-indicative values, calculates a defect-indicative value based on an inspected value representative of the analyzed pixel and determines a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.
Abstract translation: 系统包括可操作地耦合到存储器的存储器和处理器装置，以获得表示被检查对象的被检查图像的分析像素的检查噪声指示值，以及代表多个参考像素中的每一个的参考噪声指示值 的被检查图像。 处理器设备基于被检查的噪声指示值和多个参考噪声指示值来计算代表性噪声指示值，基于表示分析像素的检测值来计算缺陷指示值，并且确定存在缺陷 基于代表性噪声指示值和缺陷指示值的分析像素。
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2.发明授权公开(公告)号：US09767356B2
公开(公告)日：2017-09-19
申请号：US14738354
申请日：2015-06-12
Applicant: Applied Materials Israel Ltd.
Inventor： Moshe Amzaleg , Yehuda Cohen , Nir Ben-David Dodzen , Efrat Rozenman
CPC classification number: G06K9/00536 , G06T7/001 , G06T2207/10061 , G06T2207/30148
Abstract: A system including an interface for receiving inspection image data of an inspection image of an inspection object. The inspection image data includes information of an analyzed pixel of the inspected image and of reference pixels of the inspected image. The system further includes a memory and a processor device operatively coupled to the interface and the memory to obtain an inspected value representative of the analyzed pixel of the inspected image, and a reference value for each of the reference pixels of the inspected image. For each reference pixel, the processor devices calculates a difference between the reference value of a respective reference pixel and the inspected value of the analyzed pixel, computes a representative difference value based on the differences and determines a presence of a defect in the analyzed pixel based on the representative difference value.
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