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    Method, system, and computer program product for detection of defects based on multiple references
    1.
    发明授权
    Method, system, and computer program product for detection of defects based on multiple references 有权
    基于多个参考的检测缺陷的方法，系统和计算机程序产品

    公开(公告)号：US09070180B2

    公开(公告)日：2015-06-30

    申请号：US13773549

    申请日：2013-02-21

    Applicant: Applied Materials Israel Ltd.

    Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzin ,  Efrat Rozenman

    IPC: G06K9/00 ,  G06T7/00 ,  H01L21/67

    CPC classification number: G06T7/001 ,  G06T7/0002 ,  G06T2207/30148 ,  H01L21/67288

    Abstract: A defect detection system for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the system including: an interface for obtaining an inspected noise-indicative value and multiple reference noise-indicative values, the inspected noise-indicative value representative of an analyzed pixel and each of the reference noise-indicative values representative of a reference pixel among a plurality of reference pixels; and a processor, including: a noise analysis module, configured to compute a representative noise-indicative value based on a plurality of noise-indicative values which includes the inspected noise-indicative value and the multiple reference noise-indicative values; and a defect analysis module, configured to calculate a defect-indicative value based on an inspected value representative of the analyzed pixel, and to determine a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

    Abstract translation: 一种用于基于通过收集从被检查对象到达的信号产生的检查图像的处理来对被检查对象中的缺陷进行计算机化检测的缺陷检测系统，所述系统包括：用于获得被检查的噪声指示值和多个参考噪声指示值的接口 值，表示分析像素的被检查噪声指示值和表示多个参考像素中的参考像素的每个参考噪声指示值; 以及处理器，包括：噪声分析模块，被配置为基于包括所检查的噪声指示值和所述多个参考噪声指示值的多个噪声指示值来计算代表性噪声指示值; 以及缺陷分析模块，被配置为基于代表所分析的像素的检查值来计算缺陷指示值，并且基于代表性的噪声指示值和缺陷指示值来确定所分析的像素中的缺陷的存在 值。

    Identification of an array in a semiconductor specimen
    2.
    发明授权
    Identification of an array in a semiconductor specimen 有权

    公开(公告)号：US11645831B2

    公开(公告)日：2023-05-09

    申请号：US16922977

    申请日：2020-07-07

    Applicant: Applied Materials Israel Ltd.

    Inventor： Yehuda Cohen ,  Rafael Bistritzer

    IPC: G06T7/00 ,  G06K9/62 ,  G06V10/75

    CPC classification number: G06T7/001 ,  G06K9/6218 ,  G06V10/758 ,  G06T2207/30148

    Abstract: There is provided a method and a system configured obtain an image of a semiconductor specimen including one or more arrays, each including repetitive structural elements, and one or more regions, each region at least partially surrounding a corresponding array and including features different from the repetitive structural elements, wherein the PMC is configured to, during run-time scanning of the semiconductor specimen, perform a correlation analysis between pixel intensity of the image and pixel intensity of a reference image informative of at least one of the repetitive structural elements, to obtain a correlation matrix, use the correlation matrix to distinguish between one or more first areas of the image corresponding to the one or more arrays and one or more second areas of the image corresponding the one or more regions, and output data informative of the one or more first areas of the image.

    Method, system, and computer program product for detection of defects based on multiple references
    3.
    发明授权
    Method, system, and computer program product for detection of defects based on multiple references 有权
    基于多个参考的检测缺陷的方法，系统和计算机程序产品

    公开(公告)号：US09558548B2

    公开(公告)日：2017-01-31

    申请号：US14738370

    申请日：2015-06-12

    Applicant: Applied Materials Israel Ltd.

    Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzen ,  Efrat Rozenman

    IPC: G06K9/00 ,  G06T7/00 ,  H01L21/67

    CPC classification number: G06T7/001 ,  G06T7/0002 ,  G06T2207/30148 ,  H01L21/67288

    Abstract: A system includes a memory and a processor device operatively coupled to the memory to obtain an inspected noise-indicative value representative of an analyzed pixel of an inspected image of an inspected object, and a reference noise-indicative value representative for each of multiple reference pixels of the inspected image. The processor device computes a representative noise-indicative value based on the inspected noise-indicative value and multiple reference noise-indicative values, calculates a defect-indicative value based on an inspected value representative of the analyzed pixel and determines a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

    Abstract translation: 系统包括可操作地耦合到存储器的存储器和处理器装置，以获得表示被检查对象的被检查图像的分析像素的检查噪声指示值，以及代表多个参考像素中的每一个的参考噪声指示值 的被检查图像。 处理器设备基于被检查的噪声指示值和多个参考噪声指示值来计算代表性噪声指示值，基于表示分析像素的检测值来计算缺陷指示值，并且确定存在缺陷 基于代表性噪声指示值和缺陷指示值的分析像素。

    System, method and computer program product for defect detection based on multiple references
    5.
    发明授权
    System, method and computer program product for defect detection based on multiple references 有权
    基于多重参考的缺陷检测系统，方法和计算机程序产品

    公开(公告)号：US09070014B2

    公开(公告)日：2015-06-30

    申请号：US13773535

    申请日：2013-02-21

    Applicant: Applied Materials Israel Ltd.

    Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzin ,  Efrat Rozenman

    IPC: G06K9/00

    CPC classification number: G06K9/00536 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148

    Abstract: A defect detection system for computerized detection of defects, the system including: an interface for receiving inspection image data including information of an analyzed pixel and of a plurality of reference pixels; and a processor, including: a differences analysis module, configured to: (a) calculate differences based on an inspected value representative of the analyzed pixel and on multiple reference values, each of which is representative of a reference pixel among the plurality of reference pixels; wherein the differences analysis module is configured to calculate for each of the reference pixels a difference between the reference value of the reference pixel and the inspected value; and (b) compute a representative difference value based on a plurality of the differences; and a defect analysis module, configured to determine a presence of a defect in the analyzed pixel based on the representative difference value.

    Abstract translation: 一种用于计算机检测缺陷的缺陷检测系统，所述系统包括：用于接收包括所分析的像素和多个参考像素的信息的检查图像数据的接口; 以及处理器，包括：差异分析模块，被配置为：（a）基于代表所分析的像素的检查值和多个参考值计算差异，所述多个参考值代表所述多个参考像素中的参考像素 ; 其中所述差异分析模块被配置为针对每个参考像素计算所述参考像素的参考值和所述被检测值之间的差; 和（b）基于多个差异来计算代表性差值; 以及缺陷分析模块，被配置为基于所述代表性差值来确定所分析的像素中的缺陷的存在。

    System, method and computer program product for defect detection based on multiple references
    7.
    发明授权
    System, method and computer program product for defect detection based on multiple references 有权

    公开(公告)号：US09767356B2

    公开(公告)日：2017-09-19

    申请号：US14738354

    申请日：2015-06-12

    Applicant: Applied Materials Israel Ltd.

    Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzen ,  Efrat Rozenman

    IPC: G06K9/00 ,  G06T7/00

    CPC classification number: G06K9/00536 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148

    Abstract: A system including an interface for receiving inspection image data of an inspection image of an inspection object. The inspection image data includes information of an analyzed pixel of the inspected image and of reference pixels of the inspected image. The system further includes a memory and a processor device operatively coupled to the interface and the memory to obtain an inspected value representative of the analyzed pixel of the inspected image, and a reference value for each of the reference pixels of the inspected image. For each reference pixel, the processor devices calculates a difference between the reference value of a respective reference pixel and the inspected value of the analyzed pixel, computes a representative difference value based on the differences and determines a presence of a defect in the analyzed pixel based on the representative difference value.

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